Publications associées à Microsystème électromécanique

PROOF OF CONCEPT OF A NOVEL OPTICAL GLUCOSE ENZYME-BASED MICRO-BIOSENSOR USING SU-8

Nico de Rooij, Peter Van der Wal, Sotiria Psoma

A novel one-step microfabrication process of SU-8 films for the development of inexpensive light-weight and small size optical glucose micro-biosensors is proposed. Experimental work was carried out in order to investigate whether SU-8 photoresists, which ...

2011

Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

Olivier Martin, Thomas Gerd Siegfried

We report a high-throughput method for the fabrication of metallic nanogap arrays with high-accuracy over large areas. This method, based on shadow evaporation and interference lithography, achieves sub-10 nm gap sizes with a high accuracy of 61.5 nm. Cont ...

American Institute of Physics2011

Localized Ion Implantation Through Micro/Nanostencil Masks

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos, Philippe Langlet, Oscar Vazquez Mena

A method is presented that allows the deﬁnition of micrometer- and submicrometer-sized implanted structures in silicon without using photoresist patterning. The process is based on the use of stencils as masks in a conventional ion implanter, and is tested ...

Institute of Electrical and Electronics Engineers2011

Robust PECVD SiC membrane made for stencil lithography

Jürgen Brugger, Andreea Veronica Savu, Shenqi Xie, Oscar Vazquez Mena, Katrin Sidler Arnet, Wei Tang

Stencil lithography (SL) is a shadow mask based technique which allows parallel, resistless, micro- and nano-patterning of material through apertures in a membrane (stencil) onto a substrate [1]. The stencils are usually made of LPCVD low-stress SiN due to ...

Microelectronic Engineering2011

Photopatterning the mechanical properties of polydimethylsiloxane films

Stéphanie Lacour

Silicone rubber films with graded and localized mechanical properties are prepared using two-part polydimethylsiloxane (PDMS) elastomer, photoinhibitor compounds and conventional photolithography. First the un-cross-linked PDMS is mixed with benzophenone. ...

American Institute of Physics2011

Silicon Nanowire Arrays and Crossbars: Top-Down Fabrication Techniques and Circuit Applications

Giovanni De Micheli, Davide Sacchetto, Yusuf Leblebici, Pierre-Emmanuel Julien Marc Gaillardon, Mohamed Haykel Ben Jamaa

Several nanowire technologies have emerged recently, providing a way to continue the scaling down of complementary metal-oxide-semiconductor (CMOS) technology. The opportunities offered at the level of logic circuit design depend on the technology properti ...

2011

High aspect ratio sub-micron trenches on silicon-on-insulator and bulk silicon

Mihai Adrian Ionescu, Cyrille Hibert, Daniel Grogg, Marion Hermersdorf

This paper reports on the fabrication of sub-micron trenches on silicon-on-insulator (SOI) required in many MEMS devices and on bulk silicon. Trenches in the range of 100-500 nm had been etched with the deep reactive ion etching (DRIE) by using the SHARP ( ...

2011

Carbon nanotubes nanocomposites for microfabrication applications

László Forró, Arnaud Magrez, Sébastien Jiguet, Moshe Judelewicz, Marijana Mionic Ebersold, Thierry Stora

A composite epoxy resin consisting in a SU-8 epoxy resin, a solvent, with or without photoinitiator and carbon nanotubes in powder. When the resin is combined with the carbon nanotubes, the mechanical, thermal and electrical properties of the nanocomposite ...

2011

Pattern transfer and post processing of complex nanostructures formed by e-beam exposure in PMMA

Nico de Rooij, Sebastian Gautsch

We present results on various post processing techniques to create complex 3-dimensional nanostructures with enhanced capabilities. The starting point for all architectures is a self aligned nanopillar with surrounding circular rim in PMMA. This particular ...

Elsevier2011

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Microsystème électromécanique

PROOF OF CONCEPT OF A NOVEL OPTICAL GLUCOSE ENZYME-BASED MICRO-BIOSENSOR USING SU-8

Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

Localized Ion Implantation Through Micro/Nanostencil Masks

Robust PECVD SiC membrane made for stencil lithography

Photopatterning the mechanical properties of polydimethylsiloxane films

Silicon Nanowire Arrays and Crossbars: Top-Down Fabrication Techniques and Circuit Applications

High aspect ratio sub-micron trenches on silicon-on-insulator and bulk silicon

Microchannel plate and its manufacturing method

Carbon nanotubes nanocomposites for microfabrication applications

Pattern transfer and post processing of complex nanostructures formed by e-beam exposure in PMMA

Graph Chatbot

Chattez avec Graph Search

Robust PECVD SiC membrane made for stencil lithography

High aspect ratio sub-micron trenches on silicon-on-insulator and bulk silicon

Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

Photopatterning the mechanical properties of polydimethylsiloxane films

Localized Ion Implantation Through Micro/Nanostencil Masks

PROOF OF CONCEPT OF A NOVEL OPTICAL GLUCOSE ENZYME-BASED MICRO-BIOSENSOR USING SU-8

Silicon Nanowire Arrays and Crossbars: Top-Down Fabrication Techniques and Circuit Applications

Microchannel plate and its manufacturing method

Pattern transfer and post processing of complex nanostructures formed by e-beam exposure in PMMA

Carbon nanotubes nanocomposites for microfabrication applications