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A tool and method for flexible and rapid surface patterning technique beyond lithography based on high-resolution shadow mask method, or nanostencil, is presented. This new type of miniaturized shadow mask is fabricated by a combination of MEMS processes a ...
The invention features polymeric biomaterials formed by nucleophilic addn. reactions to conjugated unsatd. groups. These biomaterials may be used for medical treatments. [on SciFinder (R)] ...
We investigated two optical methods for characterizing submicron structures. Average errors of a few nanometers can be determined by the far-field diffraction metrology utilizing diffractive structures having enhanced sensitivity to fabrication errors. The ...
Coarse/fine position systems have been proposed, analysed and used as a mean of enhancing the performance in manufacturing tasks. The objective of the research is to combine a micro-manipulator to a general task manipulator to realize both accurate and fas ...
We present a simple method for fabricating fast resonating (90 MHz) nanomechanical elements based on the local deposition through a miniaturized shadow mask (nanostencil), followed by dry etching to release the structure from the substrate. The measured re ...
