Publications associées à Lithographie à faisceau d'électrons

Solid-state Nanopore Array Membranes Patterned by Electron Beam Lithography, Nanosphere Lithography and Aluminum Anodization

Jürgen Brugger, Andreea Veronica Savu, Nicolas Blondiaux, Songmei Wu, Oscar Vazquez Mena, Mona Julia Katharina Klein, Vaida Auzelyte, Franck Montagne

We present the fabrication of thin membranes with dense arrays of nanometer and submicrometer pore arrays by the integration of standard micromachining with three pore patterning techniques: electron beam lithography (EBL), nanosphere lithography (NSL) and ...

Research Publishing Services2011

High-throughput Fabrication of Plasmonic Nanoantenna Arrays Using Nanostencils for Spectroscopy and Biosensing

Hatice Altug, Serap Aksu, Min Huang

We demonstrate a novel approach for high-throughput and high-resolution fabrication of engineered infrared plasmonic antenna arrays with reusable nanostencils for vibrational spectroscopy. Optical responses of these antennas are identical to ones fabricate ...

IEEE2011

High-throughput nanofabrication of plasmonic structures and metamaterials with high resolution nanostencil lithography

Hatice Altug, Serap Aksu, Min Huang

We demonstrate a novel fabrication approach for high-throughput fabrication of engineered plasmonic antenna arrays and metamaterials with Nanostencil Lithography (NSL). NSL technique, relying on deposition of materials through a shadow mask, offers the fle ...

SPIE-INT SOC OPTICAL ENGINEERING2011

Planar Integrated Sensors on Waveguides for sensing applications

Hans Peter Herzig, Qing Tan, Armando Cosentino

We investigate the use of a metallic nano-cavity on dielectric waveguides for sensing applications. Nowadays the fabrication of metallic structures featured by challenging dimensions is feasible thanks to the most recent technologies such as E-Beam Lithogr ...

2011

Four-electron oxygen reduction by Tetrathiafulvalene

Hubert Girault, Astrid Johana Olaya Avendano, Péter Kalman Péchy, Jérôme Florian Gonthier, Peiyu Ge

The four-electron reduction of oxygen by tetrathiafulvalene (TTF) in acidified 1,2-dichloroethane and at the acidified water/1,2-dichloroethane interface has been observed. Spectroscopy and ion transfer voltammetry results suggest that the reaction proceed ...

2011

High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

Jürgen Brugger, Andreea Veronica Savu

A new and versatile technique for the wafer scale nanofabrication of silicon nanowire (SiNW) and multiwalled carbon nanotube (MWNT) tips on atomic force microscope (AFM) probes is presented. Catalyst material for the SiNW and MWNT growth was deposited on p ...

2011

Subwavelength-size solid immersion lens

Hans Peter Herzig, Toralf Scharf, Myun Sik Kim

We report on the fabrication and characterization of nanoscale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicrometer-scale cylinders fabricated by electron-beam lithography are thermally reflowed to form a spherical sha ...

2011

Ripples and Layers in Ultrathin MoS2 Membranes

Andras Kis, Duncan Thomas Lindsay Alexander, Jacopo Brivio

Single-layer MoS2 is a newly emerging two-dimensional semiconductor with a potentially wide range of applications in the fields of nanoelectronics and energy harvesting. The fact that it can be exfoliated down to single-layer thickness, makes MoS2 interest ...

2011

Use of webcams as tools for alignment and supervision of a Thomson scattering system in the near infrared

Basil Duval, Yanis Andrebe, Pierre Etienne, Roland Behn, Andreas Pitzschke

The alignment stability is a major concern for Thomson scattering systems. Even small angular deviations of the laser beams crossing the plasma lead to a loss of the calibration resulting in unreliable measurements of the electron density profile. For the ...

Elsevier2011

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Lithographie à faisceau d'électrons

Solid-state Nanopore Array Membranes Patterned by Electron Beam Lithography, Nanosphere Lithography and Aluminum Anodization

High-throughput Fabrication of Plasmonic Nanoantenna Arrays Using Nanostencils for Spectroscopy and Biosensing

High-throughput nanofabrication of plasmonic structures and metamaterials with high resolution nanostencil lithography

Planar Integrated Sensors on Waveguides for sensing applications

Four-electron oxygen reduction by Tetrathiafulvalene

High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

Subwavelength-size solid immersion lens

Influence of Residual Water and Carbon Containing Molecules in Focused Electron Beam Induced Processes

Ripples and Layers in Ultrathin MoS2 Membranes

Use of webcams as tools for alignment and supervision of a Thomson scattering system in the near infrared

Graph Chatbot

Chattez avec Graph Search

High-throughput nanofabrication of plasmonic structures and metamaterials with high resolution nanostencil lithography

Planar Integrated Sensors on Waveguides for sensing applications

Four-electron oxygen reduction by Tetrathiafulvalene

Subwavelength-size solid immersion lens

Use of webcams as tools for alignment and supervision of a Thomson scattering system in the near infrared

Influence of Residual Water and Carbon Containing Molecules in Focused Electron Beam Induced Processes

Ripples and Layers in Ultrathin MoS2 Membranes

Solid-state Nanopore Array Membranes Patterned by Electron Beam Lithography, Nanosphere Lithography and Aluminum Anodization

High-throughput Fabrication of Plasmonic Nanoantenna Arrays Using Nanostencils for Spectroscopy and Biosensing

High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts