Concept

Contamination control

Publications associées (4)

MicroFactory

Production in a controlled environment is becoming an increasingly important issue in various branches of industry. In the food, pharmaceutical, optical and semiconductor industries, today’s mass production would not be possible without so-called “cleanroo ...

EPFL2013

A large area (50 cm(2)) particle counter working under vacuum (10(-7) mbar) has been developed at CERN and applied to measurements of particles released by several vacuum components like valves, gauges and ion pumps. This technique has also been applied to ...

1999

Description of a dust particle detection system and measurements of particulate contamination from shock, gate valve, and ion pump under ultrahigh vacuum conditions

Dust particle contamination is known to be responsible for reduced quality and yield in microelectronic processing. However it may also limit the operation of particle accelerators as a result of beam lifetime reduction or enhanced field emission in radio- ...

1998

Powder Dynamics in Very High-Frequency Silane Plasmas

Christoph Hollenstein, Alan Howling

Particulate contamination produced during plasma-assisted deposition of amorphous silicon devices can be responsible for reduced quality and yield. The threshold for powder formation imposes an upper limit on the radio frequency (rf) power and hence the de ...

1992

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