Concept
Microélectronique
Publications associées (28)
A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications.
The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...
EPFL2022Characterization and Modeling of Total Ionizing Dose Effects on Nanoscale MOSFETs for Particle Physics Experiments
Total ionizing radiation compromises electrical characteristics of microelectronic devices and even causes functional failures of integrated circuits. It has been identified as a potential threat to electronic components, especially those in high-energy ph ...
EPFL2021Silicon Nitride Integrated Nonlinear Photonics
Recently, microresonator-based dissipative Kerr soliton frequency combs ("soliton microcomb") have emerged as miniaturized optical frequency combs. So far, soliton microcombs have been realized in many CMOS-compatible material platforms including silico ...
EPFL2020Gallium-Based Thin Films for Wearable Sensors and Electronic Skins
Integrated wearable electronics capable of providing biophysical information on complex and dynamic systems have attracted high interest in diverse fields such as healthcare, gaming and robotics. Wearable sensors can create artificial, electronic skins wit ...
EPFL2020Microfluidic sensor and method for obtaining such a sensor
Philippe Renaud, Luc Gaëtan Aeberli, Thomas Michael Braschler, David Vincent Bonzon, Marc Lany, Jonas Choppe, Niklas Van Neyghem
The invention describes a method for producing hybrid microelectronic/microfluidic sensors at industrial scale. The method is characterized in that it comprises the following steps for obtaining said microfluidic channel: a) a first lamination step of a dr ...
2018Overview on low temperature co-fired ceramic sensors
Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabricatio ...
Elsevier2015