Concept
Microélectronique
Publications associées (28)
A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications.
The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...
EPFL2022Characterization and Modeling of Total Ionizing Dose Effects on Nanoscale MOSFETs for Particle Physics Experiments
Total ionizing radiation compromises electrical characteristics of microelectronic devices and even causes functional failures of integrated circuits. It has been identified as a potential threat to electronic components, especially those in high-energy ph ...
EPFL2021Silicon Nitride Integrated Nonlinear Photonics
Recently, microresonator-based dissipative Kerr soliton frequency combs ("soliton microcomb") have emerged as miniaturized optical frequency combs. So far, soliton microcombs have been realized in many CMOS-compatible material platforms including silico ...
EPFL2020Gallium-Based Thin Films for Wearable Sensors and Electronic Skins
Integrated wearable electronics capable of providing biophysical information on complex and dynamic systems have attracted high interest in diverse fields such as healthcare, gaming and robotics. Wearable sensors can create artificial, electronic skins wit ...
EPFL2020Microstereolithography
Philippe Renaud, Arnaud Bertsch
Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of MEMS components. Most microfabrication techniques evolved from the microelectroni ...
Elsevier / William Andrew Publishing2019Methods and microfabrication techniques for subnanoliter magnetic resonance spectroscopy
Nuclear magnetic resonance (NMR), electron paramagnetic resonance (EPR) and ferromagnetic resonance (FMR) spectroscopy can open up the possibility of studying many scientifically and biologically relevant samples at the µm and sub-µm scale. Examples of vol ...
EPFL2017Overview on low temperature co-fired ceramic sensors
Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabricatio ...
Elsevier2015Microstereolithography
Philippe Renaud, Arnaud Bertsch
Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of microelectromechanical system (MEMS) components. Most microfabrication techniques ...
Elsevier2015