MICRO-534: Advanced MEMS & microsystemsIn depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications.
MICRO-621: MOOC: Micro and Nanofabrication (MEMS)Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC
MICRO-501: MEMS practicals IObjective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class
MICRO-606: Scaling in MEMSThis doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.
MICRO-470: Scaling laws in micro & nanosystemsThis class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation
ME-426: Micro/Nanomechanical devicesIn this course we will see an overview of the
exciting field of Micro and Nanomechanical systems. We will go over the dfferent scaling laws that dominate the critical parameters, how size affects mat
MICRO-331: Microfabrication technologiesThe student will learn process techniques and applications of modern micro- and nanofabrication, as practiced in a clean room, with a focus on silicon, but also multi-material microsystems and flexibl
