Concept

Kelvin probe force microscope

Publications associées (223)

FABRICATION OF ULTRA SENSITIVE MONOCRYSTALLINE SILICON CANTILEVERS

Jürgen Brugger, Giovanni Boero, Schahrazede-Lila Mouaziz, Alain Dysli

The goal of the project is to fabricate ultra sensitive cantilevers for magnetic resonance force microscopy. Such devices have been produced using SOI wafers and a novel fabrication process combining Al encapsulation and HF-vapor release. The realized cant ...

2006

Local Oxidation of Titanium Using Dynamic-Mode Tuning-Fork Probe with Microfabricated Silicon Cantilever

Nico de Rooij, Terunobu Akiyama, Kaspar Suter

We present a unique probe that is based on a quartz tuning fork and a microfabricated cantilever. The probe is self-actuating and self-sensing. The cantilever can be tailored to the needs of specific applications, in this case to feature an electrically co ...

2006

Interaction forces between surfaces coated with highly branched polyelectrolytes

Ramon Pericet Camara

In this thesis, interactions between surfaces with adsorbed highly branched polyelectrolytes were studied with the colloidal probe technique. By studying the adsorption behavior of highly branched polyelectrolytes, the lateral distribution of the surface c ...

University of Geneva2006

DRIE based novel technique for AFM probes fabrication

Luis Guillermo Villanueva Torrijo

We report on the fabrication of atomic force microscopy (AFM) probes using a novel technology that performs every machining step by means of one single deep reactive ion etching (DRIE) equipment. Specific etching conditions are optimized in order to define ...

2006

ALL TUNGSTEN AFM CANTILEVER WITH < 40 NANOMETRE PYRAMIDAL TIP

Jürgen Brugger, Johannes Steen

We develop wear resistant, electrically conducting AFM probes. Here, we describe a new AFM probe made entirely out of tungsten (W). The fabrication involves microfabrication techniques such as surface moulding, thin-film structuring of tungsten and high as ...

2005

Fully tungsten and platinum nanoprobes for electrically conducting scanning probe methods

Jürgen Brugger, Johannes Steen

Recently electrically conducting SPM probes were used as read/write sensor of magneto-resistive nanopillars and ferroelectric domains in the development of >1 Tb/inch2 data storage. Since metal coated (platinum (Pt) or Pt/iridium) silicon (Si) probes are n ...

2005

On recent developments for high-speed atomic force microscopy

Georg Fantner

The atomic force microscope (AFM) is limited in imaging speed by the bandwidth and dynamic behavior of the actuators and mechanical parts. For high-speed imaging all AFM components have to be optimized in performance. Here, we present improvements of the f ...

2005

Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE

Luis Guillermo Villanueva Torrijo

2005

Q-factor optimization of a tuning-fork/fiber sensor for shear-force detection

Majed Chergui, Andrea Callegari, Jinquan Liu

We present the results of an exptl. and theor. study on the optimum design of shear-force sensors, used in scanning probe microscopes. We have optimized a configuration consisting of a tuning-fork/fiber-tip assembly, achieving quality factors (Q) exceeding ...

2005

Microscopic four-point probe (u4PP) based on SU-8 cantilevers

Jürgen Brugger, Giovanni Boero, Schahrazede-Lila Mouaziz, Stephan Keller

Four-point probes (4PPs) are used for the resistivity measurement of thin metal or semiconductor films. There is an interest in miniaturization of 4PPs to obtain higher surface sensitivity, increased spatial resolution and less damage to the sample. Severa ...

2005

Graph Chatbot

Chattez avec Graph Search

Posez n’importe quelle question sur les cours, conférences, exercices, recherches, actualités, etc. de l’EPFL ou essayez les exemples de questions ci-dessous.

AVERTISSEMENT : Le chatbot Graph n'est pas programmé pour fournir des réponses explicites ou catégoriques à vos questions. Il transforme plutôt vos questions en demandes API qui sont distribuées aux différents services informatiques officiellement administrés par l'EPFL. Son but est uniquement de collecter et de recommander des références pertinentes à des contenus que vous pouvez explorer pour vous aider à répondre à vos questions.

Connectez-vous pour utiliser Chat avec Graph Search