Fully tungsten and platinum nanoprobes for electrically conducting scanning probe methods

Recently electrically conducting SPM probes were used as read/write sensor of magneto-resistive nanopillars and ferroelectric domains in the development of >1 Tb/inch2 data storage. Since metal coated (platinum (Pt) or Pt/iridium) silicon (Si) probes are not suitable at high current densities, probes with an entire metallic tip form a solution. We present the fabrication and characterisation of hybrid SPM probes with fully metallic cantilever and tip. One method is based on a backside opening etch in KOH solution. The other method uses a dry under-etch probe release. Fully metallic cantilevers with integrated tips of tungsten (W) and Pt have been fabricated. The body of the probes consists of the photopolymer SU-8. A tip sharpness controlling method is presented.