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Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...
An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-side areas of first and second dielectric materials. In one embodiment the first dielectric material is a piezoelectric, in particular the first dielectric mat ...
In this paper, we introduce a charge integrator as a read-out system for piezoelectric cantilever sensors. The charge integrator is used to monitor the surface charge induced by piezoelectric materials as a function of mechanical stress. This technique imp ...
Many ferroelectric solid solutions exhibit enhanced electromechanical properties at the morphotropic boundary separating two phases with different orientations of polarization. The mechanism of properties enhancement is associated with easy paths for polar ...
Nowadays interfaces between user and machines are principally based on visual informations. They use primarily displays to transfer informations from the machine to the user. However humans have 5 senses and all of them are used to interact with the enviro ...
This paper reports on the microfabrication and characterization of piezoelectric MEMS structures based on epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin films grown on silicon wafers. Membranes and cantilevers are realized using a sequence of microfabrication proc ...
Pb(Zr,Ti)O3 ceramics with homogenous, anisotropic porosity were manufactured and the influence of the anisotropic porosity on the dielectric and piezoelectric properties was studied. Image analysis allowed the quantification of the preferential orientation ...
AlN thin films were grown by reactive sputtering on amorphous SiO2 thin films. Film texture, x-ray rocking curve width, mechanical stress, and the clamped piezoelectric constant d33,f were studied as a function of rf bias power and substrate roughness. A h ...
Piezoelectric ultrasonic motors are superior to electromagnetic micro motors, because their efficiency remains theoretically constant during miniaturization. However, the still relatively recent technology has a considerable unexploited optimisation potent ...
Nanoscale and mesoscopic disorder and associated local hysteretic responses underpin the unique properties of spin and cluster glasses, phase-separated oxides, polycrystalline ferroelectrics, and ferromagnets alike. Despite the rich history of the field, t ...