Concept

Pulvérisation cathodique

Publications associées (177)

Nanostructure and Optical Property Tailoring of Zinc Tin Nitride Thin Films through Phenomenological Decoupling: A Pathway to Enhanced Control

Aïcha Hessler-Wyser, Johann Michler, Amit Sharma, Caroline Hain, Daniele Casari, Thomas Nelis

This work addresses the need for precise control of thin film sputtering processes to enable thin film material tailoring on the example of zinc tin nitride (ZTN) thin films deposited via microwave plasma-assisted high power reactive magnetron sputtering ( ...

Amer Chemical Soc2024

HfC Sputtering parameters optimization and film characterization

Joao Victor Barini Ramos

Hafnium Carbide (HfC) is a refractory ceramic known for its exceptional properties, making it suitable for a wide range of applications. This project investigates the potential utilization of HfC in Micro or Nano Electromechanical Systems (MEMS/NEMS) and e ...

2023

Manufacturing-Enabled Tunability of Linear and Nonlinear Epsilon-Near-Zero Properties in Indium Tin Oxide Nanofilms

Jiaye Wu, Qian Li, Xuanyi Liu

Epsilon-near-zero (ENZ) materialshave attracted great interestdue to their exotic linear and nonlinear responses, which makes itsignificant to tune ENZ wavelengths for wavelength-dependent applications.However, studies to achieve tunability in a wide spect ...

AMER CHEMICAL SOC2023

Status of SPIDER beam source after the first 3.5 years of operation

Michele Fadone

SPIDER is the negative ion source testbed for ITER neutral beam injector. It is currently the largest negative ion source ever built, equipped with a 100 keV accelerator, aiming at producing a negative ion beam with an extracted current density in hydrogen ...

2023

Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication

Caroline Hain

Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...

EPFL2023

Quantitative study of the thickness-dependent stress in indium tin oxide thin films

Varun Gupta

A quantitative analysis of stress in indium tin oxide (ITO) films with varying thicknesses was conducted using high-precision stylus profilometry. The experimental results revealed a transition of the stress type from tensile to compressive as the ITO film ...

Lausanne2023

From pulsed-DCMS and HiPIMS to microwave plasma-assisted sputtering: Their influence on the properties of diamond-like carbon films

Aïcha Hessler-Wyser, Johann Michler, Caroline Hain, David Brown, Thomas Nelis

The fabrication of high-hardness non-hydrogenated diamond-like carbon (DLC) via standard magnetron sputtering (MS) is often hindered by the low sputtering yields and ionisation rates of carbon, therefore investigations into pulsed alternatives of MS, else ...

ELSEVIER SCIENCE SA2022

Implementation of multi-component Zhdanov closure in SOLEDGE3X

Davide Galassi, Madhusudan Raghunathan, Eric Serre

The multi-component fluid closure derived by Zhdanov (2002 Transport Processes in Multicomponent Plasma (London: Taylor and Francis)) is implemented in the fluid code SOLEDGE3X-EIRENE to deal with arbitrary edge plasma composition. The closure assumes no d ...

2022

Simulating energetic particle losses in JET plasmas with a reverse integration biasing scheme

Mario Ludovico Podesta, Matteo Vallar

An integrated energetic particle transport model has been constructed in JET plasmas constrained by experimental fast ion loss measurements. The model incorporates a synthetic fast ion loss detector identical to JET's thin-foil Faraday cup fast ion loss de ...

IOP Publishing Ltd2022

Near-field probing of image phonon-polaritons in hexagonal boron nitride on gold crystals

Sergejs Boroviks

Near-field mapping has been widely used to study hyperbolic phonon-polaritons in van der Waals crystals. However, an accurate measurement of the polaritonic loss remains challenging because of the inherent complexity of the near-field signal and the substr ...

AMER ASSOC ADVANCEMENT SCIENCE2022

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