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Concept
MEMS magnetic actuator
Résumé
A MEMS magnetic actuator is a device that uses the microelectromechanical systems (MEMS) to convert an electric current into a mechanical output by employing the well-known Lorentz Force Equation or the theory of Magnetism.
Micro-Electro-Mechanical System (MEMS) technology is a process technology in which mechanical and electro-mechanical devices or structures are constructed using special micro-fabrication techniques. These techniques include: bulk micro-machining, surface micro-machining, LIGA, wafer bonding, etc.
A device is considered to be a MEMS device if it satisfies the following:
If its feature size is between 0.1 μm and hundreds of micrometers. (below this range, it becomes a nano device and above the range, it is considered a mesosystem)
If it has some electrical functionality in its operation. This could include the generation of voltage by electromagnetic induction, by changing the gap between 2 electrodes or by a piezoelectric material.
If the device has some mechanical functionality such as the deformation of a beam or diaphragm due to stress or strain.
If it has a system-like functionality. The device must be integrable to other circuitries to form a system. This would be the interfacing circuitry and packaging for the device to become useful.
For the analysis of every MEMS device, the Lumped assumption is made: that if the size of the device is far less than the characteristic length scale of the phenomenon (wave or diffusion), then there would be no spatial variations across the entire device. Modelling becomes easy under this assumption.
The three major operations in MEMS are:
Sensing: measuring a mechanical input by converting it to an electrical signal, e.g. a MEMS accelerometer or a pressure sensor (could also measure electrical signals as in the case of current sensors)
Actuation: using an electrical signal to cause the displacement (or rotation) of a mechanical structure, e.g. a synthetic jet actuator.
Power generation: generates power from a mechanical input, e.g.
Source officielle
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