MEMS magnetic actuator

A MEMS magnetic actuator is a device that uses the microelectromechanical systems (MEMS) to convert an electric current into a mechanical output by employing the well-known Lorentz Force Equation or the theory of Magnetism. Overview of MEMS Micro-Electro-Mechanical System (MEMS) technology is a process technology in which mechanical and electro-mechanical devices or structures are constructed using special micro-fabrication techniques. These techniques include: bulk micro-machining, surface micro-machining, LIGA, wafer bonding, etc. A device is considered to be a MEMS device if it satisfies the following:

If its feature size is between 0.1 µm and hundreds of micrometers. (below this range, it becomes a nano device and above the range, it is considered a mesosystem)
If it has some electrical functionality in its operation. This could include the generation of voltage by electromagnetic induction, by changing the gap between 2 electrodes or by a piezoelectric materia

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Summary

If its feature size is between 0.1 µm and hundreds of micrometers. (below this range, it becomes a nano device and above the range, it is considered a mesosystem)
If it has some electrical functionality in its operation. This could include the generation of voltage by electromagnetic induction, by changing the gap between 2 electrodes or by a piezoelectric materia

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Two dimensional magnetic manipulation of microdroplets on a chip

Martinus Gijs, Ulrike Lehmann, Virendra Kumar Parashar

In this paper we describe the two-dimensional (2D) magnetic manipulation of aqueous droplets suspended in silicone oil over the chip surface. The magnetic actuation is based on the force imposed on superparamagnetic microparticles inside the droplets. These can be displaced, merged, mixed and separated by changing the topology of the magnetic field created by a multilayer set of coils. The magnetic manipulation forces are generated on our chip without the use of external moving magnets. Our results demonstrate the potential of the proposed system in droplet-based biomedical analysis methods on a chip.

2005

Two dimensional magnetic manipulation of microdroplets on a chip

Martinus Gijs, Ulrike Lehmann, Virendra Kumar Parashar, Amar Rida

2005

Two-dimensional magnetic manipulation of microdroplets on a chip as a platform for bioanalytical applications

Martinus Gijs, Ulrike Lehmann, Virendra Kumar Parashar, Amar Rida, Caroline Vandevyver

Manipulating biological samples in microliter droplets has vast potential in molecular diagnostics. We present a system for the two-dimensional (2D) magnetic manipulation of aqueous droplets suspended in silicone oil as a platform for on-chip bioanalysis. Superparamagnetic microparticles inside the droplets provide the means of the magnetic actuation. The droplets can be displaced, merged, mixed and separated on the chip without the use of external moving magnets or parts. In our system three-dimensional surface structures are replaced by an optimised hydrophilic/hydrophobic patterning of the chip surface to facilitating droplet splitting. We compare the functionality of the droplet manipulation system for magnetic particles of different sizes and demonstrate a dependency between particle size and performance. Finally we present the potential of the proposed system in droplet-based biomedical analysis by performing the dilution and detection of the secondary antibody of an enzyme-linked immuno-sorbent assay (ELISA) on-chip.

2006

MICRO-470: Scaling laws & simulations in micro & nanosystems

This class combines an analytical and finite elements modeling (FEM) simulations approach to scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles.

MICRO-534: Advanced MEMS & microsystems

In depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications.

MICRO-606: Scaling in MEMS

This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.