Publications associées à Microfabrication

Development and characterization of EIS structures based on SiO2 micropillars and pores before and after their functionalization with phosphonate films

Anna Fontcuberta i Morral, Anna Dalmau Mallorquí

In this work electrolyte insulator semiconductor (EIS) structures based on lithographically fabricated Si SiO2 micropillars and pores are studied. The samples are characterized by means of impedance spectroscopy (IS) and they are compared to samples with a ...

2011

Biomimetic soft lithography on curved nanostructured surfaces

Jürgen Brugger, Thomas Kiefer, Valentin Flauraud, Vaida Auzelyte

In this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis Exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated ont ...

Elsevier Science Bv2011

High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

Jürgen Brugger, Andreea Veronica Savu

A new and versatile technique for the wafer scale nanofabrication of silicon nanowire (SiNW) and multiwalled carbon nanotube (MWNT) tips on atomic force microscope (AFM) probes is presented. Catalyst material for the SiNW and MWNT growth was deposited on p ...

2011

Signal Stability of LTCC Cantilever Force Sensors

Peter Ryser, Thomas Maeder, Caroline Jacq

In this work, we study in detail the sensing characteristics of piezoresistive force sensors based on structured LTCC (Low Temperature Co-fired Ceramic) cantilevers carrying a thick-film piezoresistive bridge. These devices show much improved sensitivity c ...

Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa2011

Ultra-low pressure sensor for neonatal resuscitator

Peter Ryser, Thomas Maeder, Caroline Jacq, Nicolas Craquelin, Enrico Haemmerle

Elsevier2011

Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications

Nico de Rooij, Danick Briand, Jinyu Jason Ruan, Pattanaphong Janphuang, Robert Andrew Lockhart, Don Isarakorn

Bulk PZT ceramics provide high electromechanical coupling (k) which is desirable for piezoelectric energy harvesters since the energy transformed from a mechanical agitation into an electrical output is proportional to k2 [1-2]. However, piezoelectric cant ...

2011

Biosensor microprobes with integrated microfluidic channels for bi-directional neurochemical interaction

Nico de Rooij, Peter Van der Wal, Olivier Frey

This paper reports on silicon-based microprobes, 8 mm long and 250 mu m x 250 mu m cross-section, comprising four recessed biosensor microelectrodes (50 mu m x 150 mu m) per probe shank coated with an enzymatic layer for the selective detection of choline ...

2011

Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Oscar Vazquez Mena, Katrin Sidler Arnet

Abstract— The reliable and reproducible fabrication of nanostructures by stencil lithography faces three main challenges: the stability of the thin stencil membranes with nanoapertures, the blurring of the deposited structures, and the clogging of the nano ...

2011

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Microfabrication

Epitaxial Piezoelectric MEMS on Silicon

Development and characterization of EIS structures based on SiO2 micropillars and pores before and after their functionalization with phosphonate films

Biomimetic soft lithography on curved nanostructured surfaces

High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

Signal Stability of LTCC Cantilever Force Sensors

Ultra-low pressure sensor for neonatal resuscitator

Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications

Biosensor microprobes with integrated microfluidic channels for bi-directional neurochemical interaction

Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections

Efficient infiltration of low molecular weight polymer in nanoporous TiO2

Graph Chatbot

Chattez avec Graph Search

Epitaxial Piezoelectric MEMS on Silicon

High Throughput Nanofabrication of Silicon Nanowire and Carbon Nanotube Tips on AFM Probes by Stencil-Deposited Catalysts

Biomimetic soft lithography on curved nanostructured surfaces

Development and characterization of EIS structures based on SiO2 micropillars and pores before and after their functionalization with phosphonate films

Signal Stability of LTCC Cantilever Force Sensors

Efficient infiltration of low molecular weight polymer in nanoporous TiO2

Ultra-low pressure sensor for neonatal resuscitator

Assembling of Thick PZT Sheet on Silicon for Energy Harvesting Applications

Biosensor microprobes with integrated microfluidic channels for bi-directional neurochemical interaction

Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring and Clogging Corrections