Concept

Microfabrication

Publications associées (307)

Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers

We have developed a micromachined flow cell consisting of a flow channel integrated with micropipettes. The flow cell is used in combination with an optical trap setup (optical tweezers) to study mechanical and structural properties of -DNA molecules. The ...

2001

Electrochemical Micromachining of Titanium through a Laser Patterned Oxide Film

Patrik Willi Hoffmann, Dieter Landolt

Selective dissolution of titanium through a laser patterned oxide film has been achieved in a 3M sulfuric acid-methanol electrolyte. The 250 nm thick oxide film was formed anodically on a flat titanium surface in 0.5 M sulfuric acid. The patterning of the ...

2001

Micromachined infrared detectors based on pyroelectric thin films

Paul Muralt

The state of the art of thin-film pyroelectric infrared (IR) detectors is reviewed covering device physics, material performance, micro-fabrication and device examples. Emphasis is given to special issues related to thin films, such as small heat capacitie ...

2001

Powder blasting as a three-dimensional microstructuring technology for MEMS applications

Martinus Gijs, Abdeljalil Sayah

We present powder blasting as a new technology for the realization of Micro Electro-Mechanical Systems (MEMS). The technique is base don the erosion of a masked substrate by a high velocity powder beam. We study the erosion rate of the process using glass ...

2000

Fabrication and test of implantable thin-film electrodes for stimulation and recording of biological signals

Philippe Renaud, Stefan Metz, Raphael Holzer

The fabrication, characterization and application of polyimide-based flexible microelectrodes for recording from and stimulation of biological tissue are described. The planar electrodes consist of a polyimide-platinum-polyimide sandwich structure with a t ...

2000

Free-standing, mobile 3D porous silicon microstructures

Philippe Renaud, Gerhard Lammel

This paper suggests a new fabrication method for surface micromachining based on porous silicon formation followed by electropolishing. in contrast to its known use as a sacrificial layer, in this work, porous silicon will be employed as constitutive mater ...

2000

3D microfabrication by combining microstereolithography and thick resist UV lithography

Philippe Renaud, Arnaud Bertsch

A new approach for the realization of true 3D polymer structures is presented in this paper. It consists in adding, in a post-processing microstereolithography step, 3D polymer microstructures on top of a micropart patterned by means of planar processes su ...

1999

Fabrication of a novel microsystem for the electrical characterisation of cell array

Martinus Gijs, Abdeljalil Sayah, Serge Hediger

We have designed and realised a new type of microsystem for the electrical characterisation of arrays of living cells for biomedical diagnostic purposes. We have used deep plasma etching for the fabrication of microholes and micro-fluidic channels in silic ...

1999

Towards better scanning near-field optical microscopy probes - progress and new developments

Nico de Rooij, Wilfried Noell

Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization prope ...

1999

Nucleation kinetics on inhomogeneous substrates: Al/Au(111)

Klaus Kern, Harald Brune

We report a quantitative atomic scale study of nucleation kinetics on an inhomogeneous substrate. Our model system, Al/Au(111)-(root 3 x 22), reveals a distinct nucleation transition due to the repulsive nature of surface dislocations. Whereas for T < 200 ...

1999

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