MICRO-373: Advanced microfabrication practicalsThis TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small
MICRO-534: Advanced MEMS & microsystemsIn depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications.
EE-536: Physical models for micro and nanosystemsStudents will learn simple theoretical models, the theoretical background of finite element modeling as well as its application to modeling charge, mass and heat transport in electronic, fluidic and e
