Concept

Electron beam-induced current

Résumé
Electron-beam-induced current (EBIC) is a semiconductor analysis technique performed in a scanning electron microscope (SEM) or scanning transmission electron microscope (STEM). It is most commonly used to identify buried junctions or defects in semiconductors, or to examine minority carrier properties. EBIC is similar to cathodoluminescence in that it depends on the creation of electron–hole pairs in the semiconductor sample by the microscope's electron beam. This technique is used in semiconductor failure analysis and solid-state physics. Physics of the technique If the semiconductor sample contains an internal electric field, as will be present in the depletion region at a p-n junction or Schottky junction, the electron–hole pairs will be separated by drift due to the electric field. If the p- and n-sides (or semiconductor and Schottky contact, in the case of a Schottky device) are connected through a picoammeter, a current will flow. EBIC is best understood by analog
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