Concept

Scanning probe lithography

Publications associées (109)

Development of novel SU-8 based nanoimprint lithography

We present two kinds of novel nanoimprint lithography techniques based on SU-8 photoresist with single layer and tri-layer approaches. The imprint templates with high aspect ratio were first fabricated by electron beam lithography (EBL) and reactive ion et ...

2008

Fabrication of 150 nm half-pitch grating templates for nanoimprint lithography

Shenqi Xie, Yi-Chiang Sun

We present the fabrication of 150 nm half-pitch Si grating templates by reactive ion etch (RIE), which are used in nanoimprint lithography (NIL) for high groove density gratings in SU-8 plastic. The etch properties such as the etch rate, profile and etchin ...

2008

Stencil assisted reactive ion etching for micro and nano patterning

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Stencil-assisted oxygen reactive ion etching is a low-cost and parallel process for the replication of micrometric and nanometric patterns in any organic material. This lithography process allows the patterning of organic material non sensitive to electron ...

2008

Local infiltration of planar photonic crystals with UV-curable polymers

Romuald Houdré, Libero Zuppiroli, Rolando Ferrini, Laurent Balet

We present the local polymer infiltration of planar photonic crystal cavities via a maskless laser-writing technique. After the infiltration of the air holes with a UV-curable monomer a focused laser is used to locally polymerize the monomer in selected ho ...

2008

Thermal Contact Calibration between a Thermocouple Probe and a Microhotplate

Danick Briand

Since local thermal probing has become a major tool for studying transport phenomena at micro- and nanoscale levels, the fundamental aspect of the interaction between the tip of the probe and the sample has remained the key point on which any quantitative ...

2008

Fabrication of planar chiral photonic meta-materials on SU- 8 using nanoimprint lithography technique

Shenqi Xie, Yi-Chiang Sun

We present a photonic meta-material with planar dielectric chiral structures on SU-8 realized using nanoimprint lithography (NIL). A Si template with chiral structure arrays was first fabricated by electron beam lithography (EBL) followed by reactive ion e ...

2007

Nanostenciling for fabrication and interconnection of nanopatterns and microelectrodes

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Sébastien Gauthier

Stencil lithography is used for patterning and connecting nanostructures with metallic microelectrodes in ultrahigh vacuum. Microelectrodes are fabricated by static stencil deposition through a thin silicon nitride membrane. Arbitrary nanoscale patterns ar ...

2007

Nanostenciling for combinatorial fabrications and interconnections of nanopatterns and microelectrodes

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Sébastien Gauthier

2007

Nano-patterning of solid substrates by adsorbed dendrimers

Ramon Pericet Camara, Michal Borkovec

Weakly charged solid substrates can be nano-patterned in liquid-like order with large and well-defined spacing by adsorbing poly(amido amine) (PAMAM) dendrimers; highly charged substrates lead to lower spacing due to electrostatic three-body attractions be ...

Royal Society of Chemistry2007

Microfabricated electrically conducting and wear-resistant nanoprobes for scanning probe applications

Johannes Steen

The era of scanning probe microscopy (SPM) started twenty years ago. A cut gold cantilever with a glued diamond stylus served as the scanning probe. Within a few years the crystalline silicon (Si) became the – up to today – predominant SPM probe material. ...

EPFL2007

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