Concept

Gravure (microfabrication)

Publications associées (401)

Thermal conductivity contrast measurement of fused silica exposed to low-energy femtosecond laser pulses

Femtosecond laser irradiation has various noticeable effects on fused silica. Of particular interest, pulses with energy levels below the ablation threshold can locally increase the refractive index and the material etching selectivity to hydrofluoric acid ...

American Institute of Physics2006

Polymer-based cantilevers with integrated electrodes

Jürgen Brugger, Giovanni Boero, Radivoje Popovic, Schahrazede-Lila Mouaziz

An innovative release method of polymer cantilevers with embedded integrated metal electrodes is presented. The fabrication is based on the lithographic patterning of the electrode layout on a wafer surface, covered by two layers of SU-8 polymer: a 10-um-t ...

Institute of Electrical and Electronics Engineers2006

Can InAlN/GaN be an alternative to high power/high temperature AlGaN/GaN devices ?

Jean-François Carlin, Eric Feltin, Marcel Py, Marcus Gonschorek, Daniel Grandjean

The performance of novel AlInN/GaN HEMTs for high power / high temperature applications is discussed. With 0.25 mu m gate length the highest maximum output current density of more than 2 A/mm at room temperature and more than 3 A/mm at 77 K have been obtai ...

IEEE2006

Dry etching release of polymer-based cantilevers with integrated electrodes

Jürgen Brugger, Giovanni Boero, Radivoje Popovic, Schahrazede-Lila Mouaziz, Chantal Imboden

We report here a new method to release functional SU-8 micro-cantilevers with embedded metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducibl ...

2006

Emerging Nanopatterning Methods based on MEMS Technology

Jürgen Brugger

The development of nanosystems and nano-devices demands for patterning methods in the nanoscale. To bring them to the market, there is a need for fast, low-cost nanopatterning methods. In addition, an increased flexibility is important for the engineering ...

2006

Directed assembling of gold nanoparticles using Van der Waals interactions

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

In the last past years, many promising applications of nanoparticles in quantum electronics such as nanocrystal memories, chemical sensors or nanodevices based on single electron tunneling and Coulomb blockade effects have attracted much attention. Nanopar ...

2006

Relativistic Hamiltonian guiding center drift formalism in anisotropic pressure magnetic coordinates

Jonathan Graves, Wilfred Anthony Cooper, Martin Jucker

A Hamiltonian formulation of the relativistic guiding center drifts is extended to anisotropic pressure plasmas. The magnetic coordinates devised by Boozer are adapted to the anisotropic pressure model and retain canonical properties for two-dimensional an ...

2006

The effect of photonic crystal structure on the nonlinear optical anisotropy of the birefringent porous silicon

Anisotropic photonic crystal structures consisting of birefringent porous silicon layers with alternating porosity were fabricated. The in-plane birefringence formed as a result of anisotropic etching in Si(110) results in unique multilayered structures wi ...

2006

Selective etching of n-InP(1 0 0) triggered at surface dislocations induced by nanoscratching

Christophe Ballif, Johann Michler

This work investigates selective dissolution of n-InP(1 0 0) triggered by surface defects. Nanometer size grooves were produced by sensitizing an InP surface with a mechanical contact patterning technique, i.e. nanoscratching at low loading forces at the t ...

2006

Correlation between optical properties and interfaces morphology of GaAs/AlGaAs quantum wells

Elyahou Kapon, Alok Rudra, Daniel Oberli, Nicolas Moret

We investigate the embedded interfaces of GaAs/AlGaAs quantum wells grown by metal organic vapor phase epitaxy on slightly (< 1 degrees)-misoriented (001) substrates using selective etching and atomic force microscopy. Depending on the substrate misorienta ...

American Institute of Physics2006

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