Concept

Nanosystème électromécanique

Publications associées (369)

In-situ stabilization of membranes for improved large-area and high-density nanostencil lithography

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Patterning of micro- and nanometer scale structures by means of nanostencils (shadow masks) is increasingly being used as a simple, clean and low-cost alternative to photolithography. It can be shown, that sub-100-nm scale features can be fabricated throug ...

2005

Combined Al-protection and HF-vapour release process for ultrathin cantilevers

Jürgen Brugger, Giovanni Boero, Schahrazede-Lila Mouaziz

Cantilever-based detection of ultrasmall forces is of great interest for several applications such as magnetic resonance force miscroscopy (MRFM) where an ultrahigh sensitive cantilever is used to detect magnetic resonance in small ensembles of electron or ...

2005

HIGH ASPECT RATIO SiLICON NANOFABRICATION (HARSiN) TECHNOLOGY

Cyrille Hibert

A simplified process to fabricate high aspect ratio nanostructures in silicon combining electron beam lithography and deep reactive ion etching (DRIE) is presented. A stable process (HARSiN) has been developed without the need for complicated resist/hard m ...

2005

EVAPORATION THROUGH SHADOW MASKS ON UNCONVENTIONAL SUBSTRATES

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Chantal Imboden

While standard photolithography methods have proven themselves in semiconductor applications, they have fundamental limitations when considered for the fabrication of advanced micro/nanosystems (MEMS/NEMS). MEMS and NEMS often use “soft” materials such as ...

2005

On recent developments for high-speed atomic force microscopy

Georg Fantner

The atomic force microscope (AFM) is limited in imaging speed by the bandwidth and dynamic behavior of the actuators and mechanical parts. For high-speed imaging all AFM components have to be optimized in performance. Here, we present improvements of the f ...

2005

Fully tungsten and platinum nanoprobes for electrically conducting scanning probe methods

Jürgen Brugger, Johannes Steen

Recently electrically conducting SPM probes were used as read/write sensor of magneto-resistive nanopillars and ferroelectric domains in the development of >1 Tb/inch2 data storage. Since metal coated (platinum (Pt) or Pt/iridium) silicon (Si) probes are n ...

2005

Nanocomposites based on luminescent colloidal nanocrystals in polymers: new opportunities for micro and nano fabrication

Jürgen Brugger, Vahid Fakhfouri

In recent years a wide range of materials including metals, semiconductors and metal oxides have been synthesized with nanometer dimensions. In particular II–VI semiconductor nanocrystals (NCs) are receiving considerable attention for fundamental studies a ...

2005

Silicon Nanowires Patterning by Sidewall and Nano-Oxidation Processing

Jürgen Brugger

The aim of this paper is to present a novel approach to pattern silicon nanowires for advanced electronics applications. A simple non-lithographic process was successfully developed to define sub-40nm diameter silicon wires and to connect them to test pads ...

2005

Correlations between adhesion hysteresis and friction at molecular scales

Andrzej Kulik, Gérard Gremaud

Correlations between adhesion hysteresis and local friction are theoretically and experimentally investigated. The model is based on the classical theory of adhesional friction, contact mechanics, capillary hysteresis, and nanoscale roughness. Adhesion hys ...

2005

Ties between Microsystems Technology and Nano-Engineering

Jürgen Brugger, Christian Santschi, Marc Antonius Friedrich van den Boogaart, Schahrazede-Lila Mouaziz, Johannes Steen, Nao Takano, Maïté Volatier

Our research is centered on the engineering of structures at the mesoscopic length scale. Patterns between the micrometer and nanometer bridge molecules and biological cells to microelectronics and microsystems, and further to the macroworld, and vice vers ...

2004

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