Concept

Sputter deposition

Publications associées (588)

Novel Digital and Radio Frequency Electronic Functions Enabled by Steep-Slope Phase-Change Devices

In the past half-century, the semiconductor industry has relied on the scaling of complementary metal-oxide-semiconductor (CMOS) transistor dimensions and on material and geometrical innovations to increase the computational density. Approaching the end of ...

EPFL2018

Efficient Planar Perovskite Solar Cells Using Passivated Tin Oxide as an Electron Transport Layer

Mohammad Khaja Nazeeruddin, Marco Calizzi, Sanghyun Paek, Yonghui Lee, Kyung Taek Cho, Aron Joel Huckaba

Planar perovskite solar cells using low-temperature atomic layer deposition (ALD) of the SnO2 electron transporting layer (ETL), with excellent electron extraction and hole-blocking ability, offer significant advantages compared with high-temperature depos ...

Wiley2018

RF bias to suppress post-oxidation of mu c-Si:H films deposited by inductively-coupled plasma using a planar RF resonant antenna

Ivo Furno, Alan Howling, Philippe Frédérique Bruno Guittienne, Rémy Jacquier

One challenge for microcrystalline silicon (mu c-Si:H) deposition is to achieve high deposition rates while maintaining high quality films. In this work, an inductively-coupled plasma (ICP) is used to deposit mu c-Si:H on glass substrates by means of a nov ...

2018

Simulation of Gas- and Liquid-Phase Layer-By-Layer Deposition of Metal Oxides by Coarse-Grained Modeling

Jeremy Luterbacher, Florent Emmanuel Héroguel, Benjamin Pierre Le Monnier, Kristopher Brown, Chiara Saggese

Atomic layer deposition (ALD) and chemical layer deposition (CLD) are techniques to produce conformal, atomically precise overcoats for materials in gas and liquid phases, respectively. Although it is a challenge to explicitly model ALD/CLD dynamics becaus ...

2018

Organic-Inorganic Hybrid Planarization and Water Vapor Barrier Coatings on Cellulose Nanofibrils Substrates

Yves Leterrier, Feyza Karasu Kiliç

Cellulose nanofibrils (CNF) can be produced in the form of thin, transparent and flexible films. However, the permeability of such materials to oxygen and water vapor is very sensitive to moisture, which limits their potential for a variety of packaging an ...

2018

What Limits Mobility in Hydrogenated Indium Oxide?

Monica Morales Masis, Laura Ding, Michael Elias Stückelberger, Martial Duchamp, Fabien Paul Jacques Dauzou

Understanding the electron scattering mechanisms dominating transport in high and low mobility transparent conducting oxides can provide insight into improving the properties of this crucial photovoltaic device layer. Contributions from ionized impurity sc ...

IEEE2018

Slowing the Kinetics of Alumina Sol-Gel Chemistry for Controlled Catalyst Overcoating and Improved Catalyst Stability and Selectivity

Jeremy Luterbacher, Florent Emmanuel Héroguel, Yuan-Peng Du

Catalyst overcoating is an emerging approach to engineer surface functionalities on supported metal catalyst and improve catalyst selectivity and durability. Alumina deposition on high surface area material by sol–gel chemistry is traditionally difficult t ...

2018

Size control of self-organized gold nanoparticles on nanopatterned single crystal diamond

Olivier Martin, Niels Quack, Christian Santschi, Sichen Mi

Surface patterning using plasmonic nanoparticles has attracted increasing interest owing to their wide use in sensing, imaging and medical applications. In this report we demonstrate bottom-up engineering of size distribution of gold nanoparticles (AuNPs) ...

IEEE2018

A rubidium vapor source for a plasma source for AWAKE

Gennady Plyushchev

We present the scheme for a rubidium vapor source that is used as a plasma source in the AWAKE plasma wakefield acceleration experiment. The plasma wakefield acceleration process requires a number of stringent parameters for the plasma: electron density ad ...

2018

Experimental validation of an analytical kinetic model for edge-localized modes in JET-ITER-like wall

Olivier Sauter, Ambrogio Fasoli, Basil Duval, Stefano Coda, Jonathan Graves, Yves Martin, Duccio Testa, Patrick Blanchard, Alessandro Pau, Cristian Sommariva, Henri Weisen, Richard Pitts, Yann Camenen, Jan Horacek, Javier García Hernández, Marco Wischmeier, Nicola Vianello, Mikhail Maslov, Federico Nespoli, Yao Zhou, David Pfefferlé, Davide Galassi, Antonio José Pereira de Figueiredo, Jonathan Marc Philippe Faustin, Liang Yao, Dalziel Joseph Wilson, Hamish William Patten, Samuel Lanthaler, Bernhard Sieglin, Otto Asunta

The design and operation of future fusion devices relying on H-mode plasmas requires reliable modelling of edge-localized modes (ELMs) for precise prediction of divertor target conditions. An extensive experimental validation of simple analytical predictio ...

2018

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