Publications de Christophe Yamahata

High-angular-range electrostatic rotary stepper micromotors fabricated with SOI technology

Martinus Gijs, Christophe Yamahata, Marc Stranczl

Flexible bearings are advantageous for microelectromechanical systems as they enable precise, accurate, repeatable, and reliable motion without frictional contact. Based on the principle of a rotary folded-beam suspension, we have designed, fabricated, mod ...

Institute of Electrical and Electronics Engineers2012

Temporally aliased video microscopy: an undersampling method for in-plane modal analysis of microelectromechanical systems

Martinus Gijs, Christophe Yamahata, Marc Stranczl

A simple optical method is proposed for performing in-plane experimental modal analysis of micromachined structures with a conventional charge-coupled device (CCD) camera. The motion of a micromechanical device actuated by high frequency sinusoidal forces ...

Institute of Electrical and Electronics Engineers2012

Subpixel translation of MEMS measured by discrete Fourier transform analysis of CCD images

Martinus Gijs, Christophe Yamahata, Marc Stranczl

We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with a subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device ( ...

2011

Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor

Martinus Gijs, Christophe Yamahata, Marc Stranczl

We present the design, modeling and characterization of a 3-phase electrostatic rotary stepper micromotor. The proposed motor is a monolithic device fabricated using silicon-on-insulator (SOI) technology. The rotor is suspended with a frictionless flexural ...

IEEE2011

Subnanometer translation of microelectromechanical systems measured by discrete Fourier analysis of CCD images

Martinus Gijs, Christophe Yamahata

In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing periodic micropatterns with a CCD camera attached to an optical microscope. The translation of the microstructure is retrieved from the vid ...

Institute of Electrical and Electronics Engineers2010

Miniaturized PMMA ball-valve micropump with cylindrical electromagnetic actuator

Martinus Gijs, Christophe Yamahata, Meng Shen

We have fabricated and characterized a reciprocating poly(methylmetacrylate) (PMMA) ball-valve micropump actuated with a miniaturized cylindrical electromagnetic circuit. By finite element calculations, we have optimized the structure of the electromagnet ...

2008

A high-performance compact electromagnetic actuator for a PMMA ball-valve micropump

Martinus Gijs, Christophe Yamahata, Meng Shen

We present the microfabrication and characterization of a reciprocating-type poly(methylmetacrylate) (PMMA) ball-valve micropump which is actuated with a high-performance and compact electromagnetic circuit of centimeter size. We have improved by finite el ...

Institute of Physics2008

Pumping of mammalian cells with a nozzle-diffuser micropump

Martinus Gijs, Horst Vogel, Caroline Vandevyver, Christophe Yamahata, Frédéric Lacharme, Paulina Izewska

We discuss the successful transport of jurkat cells and 5D10 hybridoma cells using a reciprocating micropump with nozzle-diffuser elements. The effect of the pumping action on cell viability and proliferation, as well as on the damaging of cellular membran ...

Royal Society of Chemistry2005

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Christophe Yamahata

High-angular-range electrostatic rotary stepper micromotors fabricated with SOI technology

Temporally aliased video microscopy: an undersampling method for in-plane modal analysis of microelectromechanical systems

Subpixel translation of MEMS measured by discrete Fourier transform analysis of CCD images

Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor

Subnanometer translation of microelectromechanical systems measured by discrete Fourier analysis of CCD images

Miniaturized PMMA ball-valve micropump with cylindrical electromagnetic actuator

A high-performance compact electromagnetic actuator for a PMMA ball-valve micropump

Magnetically actuated micropumps

Pumping of mammalian cells with a nozzle-diffuser micropump

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Temporally aliased video microscopy: an undersampling method for in-plane modal analysis of microelectromechanical systems

Subpixel translation of MEMS measured by discrete Fourier transform analysis of CCD images

High-angular-range electrostatic rotary stepper micromotors fabricated with SOI technology

A high-performance compact electromagnetic actuator for a PMMA ball-valve micropump

Subnanometer translation of microelectromechanical systems measured by discrete Fourier analysis of CCD images

Magnetically actuated micropumps

Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor

Miniaturized PMMA ball-valve micropump with cylindrical electromagnetic actuator

Pumping of mammalian cells with a nozzle-diffuser micropump