Publications de Alvaro Artieda

Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

Paul Muralt, Evgeny Milyutin, Ramin Matloub Aghdam, Silviu Cosmin Sandu, Alvaro Artieda

AlN films are employed in RF filters for wireless communication. We report on enhanced coupling factors k(t)(2) obtained by partial substitution of Al by Sc. Al0.88Sc0.12N films were deposited by reactive magnetron sputtering from an Al0.9Sc0.1 alloy targe ...

AIP American Institute of Physics2011

AIN Thin Film Structures for High-Q Resonators

Alvaro Artieda

The development of wireless and mobile communication in the last decade led to the elaboration of new components based on thin films with continually increasing performance and reduced fabrication cost. A fundamental element for mobile communication is the ...

EPFL2010

Highly piezoelectric AlN thin films grown on amorphous, insulating substrate

Paul Muralt, Silviu Cosmin Sandu, Alvaro Artieda

AlN thin films were grown by reactive sputtering on amorphous SiO2 thin films. Film texture, x-ray rocking curve width, mechanical stress, and the clamped piezoelectric constant d33,f were studied as a function of rf bias power and substrate roughness. A h ...

2010

Piezoelectric materials parameters for piezoelectric thin films in GHz applications

Paul Muralt, Marco Cantoni, Alvaro Artieda, Janine Conde

Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, material ...

Cambridge University Press2009

Effect of substrate roughness on c-oriented AlN thin films

Paul Muralt, Alvaro Artieda, Michela Antonella Barbieri

(001)-textured AlN thin films as needed for bulk acoustic wave devices exhibit large mechanical stress variations as a function of growth substrate properties. We studied the relationship between stress and the surface morphology of a thermally oxidized si ...

2009

High-Q AlN/SiO2 Symmetric Composite Thin Film Bulk Acoustic Wave Resonators

Paul Muralt, Alvaro Artieda

2008