Publications de Georges-André Racine

High-density, high-aspect ratio epoxy microstructures by Direct Write Laser Patterning

Jürgen Brugger, Georges-André Racine, Victor Javier Cadarso Busto, Vaida Auzelyte, Jean-Baptiste Bureau

2010

Direct writing laser of high aspect ratio epoxy microstructures

Jürgen Brugger, Georges-André Racine, Victor Javier Cadarso Busto, Jean-Baptiste Bureau

The development of high aspect ratio (AR) structures is of great interest in several ﬁelds such as micro-electro-mechanical systems or microﬂuidics. In this note we present a new processing method of epoxy materials based on direct write laser (DWL) scanni ...

Institute of Physics2010

Polyimide sacrificial layer for SOI SG-MOSFET pressure sensor

Mihai Adrian Ionescu, Didier Bouvet, Vincent Pott, Montserrat Fernandez-Bolanos Badia, Nicolas Abelé, Georges-André Racine

This paper reports on the fabrication and electrical characterization of a novel pressure sensor based on a suspended-gate MOSFET (SG-MOSFET) using a new polyimide process. The device is composed of a SG-MOSFET built on a thin SOI membrane released by a ba ...

Elsevier2006

Polyimide sacrificial layer process for SOI SG-MOSFET pressure sensor

Mihai Adrian Ionescu, Didier Bouvet, Vincent Pott, Montserrat Fernandez-Bolanos Badia, Nicolas Abelé, Georges-André Racine

2005

3-D integrable optoelectronic devices for telecommunications ICs

Mihai Adrian Ionescu, Luc Thévenaz, Philippe Renaud, Michel Declercq, Philippe Robert, Cyrille Hibert, Philippe Flückiger, Georges-André Racine

The design, fabrication and characterization of CMOS-compatible optoelectronic devices is discussed. All devices are fabricated on silicon on insulator (SOI) substrates which makes them suitable for three-dimensional (3-D) telecommunication photonic integr ...

2002

A novel CMOS SOI unbalanced Mach-Zehnder interferometer: from design and simulations to fabrication and characterization

Mihai Adrian Ionescu, Luc Thévenaz, Philippe Renaud, Michel Declercq, Cyrille Hibert, Philippe Robert, Philippe Flückiger, Georges-André Racine

This paper reports on a novel, simple yet reliable, unbalanced SOI Mach-Zehnder (M-Z) interferometer architecture based on 1.2 μm CMOS process and adapted post-processing for the waveguide sidewalls. The fabricated electro-optical device is based on multip ...

2001