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A micromirror array composed of 2048 silicon micromirrors measuring 200 x 100 mu m(2) and tilting by 25 degrees was developed as a reconfigurable slit mask for multi-object spectroscopy (MOS) in astronomy. The fill factor, contrast, and mirror deformation ...
In multi-object spectrometers, field selectors, which are located in the focal plane of the telescopes, are required for the selection of astronomical objects, such as stars or faint galaxies. We present a two-dimensional micromirror array as a field selec ...
Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for the study of the formation and evolution of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are engaged in a Europ ...
Understanding the formation of galaxies and studying the expansion of the Universe, need the spectral characterization of faint astronomical objects such as stars or galaxies. From these spectra, the distance, the velocity and the chemical composition of t ...
EPFL2012
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We have fabricated and characterized fully programmable diffraction gratings consisting of 64 silicon micro-mirrors. The mirrors are 700 mu m long and 50 mu m wide with a fill factor of 90%. They are actuated electrostatically and move down by 1.25 mu m wh ...
Optical Society of America2012
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Multi-object spectroscopy is a powerful tool for space and ground-based telescopes for the study of the formation of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are developing MEMS-based programmable ref ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011
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MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated using multiple wafer-level bonding and implemented with individual addressing of each element. ...
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2011
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Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for studying the formation of galaxies. This technique requires a programmable slit mask for astronomical object selection. A first sample of MEMS-based programmable r ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2010
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MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability. ...
Multi-object spectroscopy (MOS) allows measuring infrared spectra of faint astronomical objects that provides information on the evolution of the Universe. MOS requires a slit mask for object selection at the focal plane of the telescope. We are developing ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2012
