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Michael David Canonica

Related publications (13)

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Optical characterization of two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Nico de Rooij, Michael David Canonica, Wilfried Noell

A micromirror array composed of 2048 silicon micromirrors measuring 200 x 100 mu m(2) and tilting by 25 degrees was developed as a reconfigurable slit mask for multi-object spectroscopy (MOS) in astronomy. The fill factor, contrast, and mirror deformation ...

Optical Society of America2013

The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Nico de Rooij, Michael David Canonica, Wilfried Noell

In multi-object spectrometers, field selectors, which are located in the focal plane of the telescopes, are required for the selection of astronomical objects, such as stars or faint galaxies. We present a two-dimensional micromirror array as a field selec ...

Institute of Physics2013

Large Micromirror Array Based on a Scalable Technology for Astronomical Instrumentation

Michael David Canonica

Understanding the formation of galaxies and studying the expansion of the Universe, need the spectral characterization of faint astronomical objects such as stars or galaxies. From these spectra, the distance, the velocity and the chemical composition of t ...

EPFL2012

Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding

Nico de Rooij, Michael David Canonica, Wilfried Noell

Multi-object spectroscopy (MOS) allows measuring infrared spectra of faint astronomical objects that provides information on the evolution of the Universe. MOS requires a slit mask for object selection at the focal plane of the telescope. We are developing ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2012

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We have fabricated and characterized fully programmable diffraction gratings consisting of 64 silicon micro-mirrors. The mirrors are 700 mu m long and 50 mu m wide with a fill factor of 90%. They are actuated electrostatically and move down by 1.25 mu m wh ...

Optical Society of America2012

Large micromirror array designed and tested for Multi-Object Spectroscopy

Michael David Canonica, Wilfried Noell

MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability. ...

Ieee2012

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Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for the study of the formation and evolution of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are engaged in a Europ ...

Spie-Int Soc Optical Engineering2012

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Multi-object spectroscopy is a powerful tool for space and ground-based telescopes for the study of the formation of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are developing MEMS-based programmable ref ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011

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MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated using multiple wafer-level bonding and implemented with individual addressing of each element. ...

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2011

Realization and Characterization of MEMS-Based Programmable Slit Mask for Multi-Object Spectroscopy

Nico de Rooij, Michael David Canonica, Wilfried Noell

Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for studying the formation of galaxies. This technique requires a programmable slit mask for astronomical object selection. A first sample of MEMS-based programmable r ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2010