Dimitrios Tsamados

Cette personne n’est plus à l’EPFL

Publications associées (23)

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MEMS Tunable Capacitor with Fragmented Electrodes and Rotational Electro-Thermal Drive

Mihai Adrian Ionescu, Alexander Mehdaoui, Dimitrios Tsamados

2007

MEMS Tunable Capacitor with laterally driven fragmented electrodes and electro-thermal actuation

Mihai Adrian Ionescu, Alexander Mehdaoui, Dimitrios Tsamados

2006

High tuning range AlSi RF MEMS capacitors fabricated with sacrificial amorphous silicon surface micromachining

Mihai Adrian Ionescu, Philippe Renaud, Michel Declercq, Catherine Dehollain, Cyrille Hibert, Philippe Flückiger, Raphaël Fritschi, Dimitrios Tsamados, Florin Udrea

This paper reports the fabrication and electrical characterization of high tuning range AlSi RF MEMS capacitors. We present experimental results obtained by a surface micromachining process that uses dry etching of sacrificial amorphous silicon to release ...

2004

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MEMS Tunable Capacitor with Fragmented Electrodes and Rotational Electro-Thermal Drive

Mihai Adrian Ionescu, Alexander Mehdaoui, Dimitrios Tsamados

2007

MEMS Tunable Capacitor with laterally driven fragmented electrodes and electro-thermal actuation

Mihai Adrian Ionescu, Alexander Mehdaoui, Dimitrios Tsamados

2006

High tuning range AlSi RF MEMS capacitors fabricated with sacrificial amorphous silicon surface micromachining

Mihai Adrian Ionescu, Philippe Renaud, Michel Declercq, Catherine Dehollain, Cyrille Hibert, Philippe Flückiger, Raphaël Fritschi, Dimitrios Tsamados, Florin Udrea

2004