Doubly-clamped nanowire electromechanical resonators that can be used to generate parametric oscillations and feedback self-sustained oscillations. The nanowire electromechanical resonators can be made using conventional NEMS and CMOS fabrication methods. ...

2013

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This work reports on a considerable resolution improvement of micro/nanostencil lithography when applied on full-wafer scale by using compliant membranes to reduce gap-induced pattern blurring. Silicon nitride (SiN) membranes are mechanically decoupled fro ...

2012

High-Resolution Resistless Nanopatterning on Polymer and Flexible Substrates for Plasmonic Biosensing Using Stencil Masks

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Oscar Vazquez Mena, Mahmut Tosun

The development of nanoscale lithographic methods on polymer materials is a key requirement to improve the spatial resolution and performance of flexible devices. Here, we report the fabrication of metallic nanostructures down to 20 and 50 nm in size on po ...

American Chemical Society2012

All-stencil transistor fabrication on 3D silicon substrates

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Cyrille Hibert, Cristina Martin Olmos, Philippe Langlet, Oscar Vazquez Mena, Peter Vettiger, Katrin Sidler Arnet

The standard lithographic techniques to fabricate electronic components involve the use of polymers, baking steps and chemicals. This typically restricts their application to flat substrates made up of standard materials. Stencil lithography has been propo ...

Iop Publishing Ltd2012

A novel high-throughput on-wafer electromechanical sensitivity characterization system for piezoresistive cantilevers

Luis Guillermo Villanueva Torrijo

In this work we present the development of a new set-up that allows on-wafer sensitivity characterization of piezoresistive cantilevers. In this way we reduce considerably the testing time compared to the techniques available up to date but at the same tim ...

2012

Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

Luis Guillermo Villanueva Torrijo

Validation of a technological process requires an intensive characterization of the performance of the resulting devices, circuits, or systems. The technology for the fabrication of micro and nanoelectromechanical systems (MEMS and NEMS) is evolving rapidl ...

2012

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Processing fl exibility and good mechanical properties are the two major reasons for SU-8 extensive applicability in the micro-fabrication of devices. In order to expand its usability down to the nanoscale, conductivity of ultra-thin SU-8 layers as well as ...

Wiley-Blackwell2012

Highly ordered palladium nanodot patterns for full concentration range hydrogen sensing

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Thomas Kiefer

A hydrogen sensor based on a novel fabrication process that combines the precision of advanced nano-fabrication techniques with a bottom-up process based on electrochemistry is presented. The sensor allows for reliable detection between 0.1% and 100% of H2 ...

2012

Ultra-low power hydrogen sensing based on a palladium-coated nanomechanical beam resonator

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Jonas Gustav Henriksson

Hydrogen sensing is essential to ensure safety in near-future zero-emission fuel cell powered vehicles. Here, we present a novel hydrogen sensor based on the resonant frequency change of a nanoelectromechanical clamped-clamped beam. The beam is coated with ...

Royal Soc Chemistry2012

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