Luis Guillermo Villanueva Torrijo

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FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS

Luis Guillermo Villanueva Torrijo, Seniz Esra Küçük, Soumya Yandrapalli, Victor Plessky

This work presents the fabrication and analysis of suspended thin film Lithium Niobate resonators. The yield of the new fabrication process presented below is >90% showing devices with high k(t)(2) of 28% resonators at 5GHz, making them suitable for high f ...

IEEE2021

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The recently invented laterally excited bulk wave resonators (XBARs) demonstrate outstanding parameters suitable for the design of low loss filters for the fifth generation of mobile phones. The operation of XBARs can be interpreted as an excitation of ant ...

WILEY2021

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This paper presents the use of a novel type of resonators made of a thin membrane of Y-cut Lithium Niobate that has an array of interdigitated electrodes on the top, and a floating metal on the bottom. Each electrode gives rise to a quasi-independent reson ...

IEEE2021

Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

Philippe Renaud, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Damien Maillard, Stefano Silvio Giovanni Varricchio, Carlo Ricciardi, Davide Scaiola, Stefano Stassi

Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrif ...

ELSEVIER2020

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

Luis Guillermo Villanueva Torrijo, Sayedeh Shirin Afyouni Akbari, Stefan Wagner

Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the inte ...

2020

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In this paper we investigate the direct effect of resonator quality factor (Q) on the oscillator phase noise. We use 2-port contour mode resonators (CMRs), fabricated both with aluminum nitride (AlN) and aluminum scandium nitride (AlScN), as the frequency- ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2020

Large Suspended Monolayer and Bilayer Graphene Membranes with Diameter up to 750 mu m

Luis Guillermo Villanueva Torrijo, Tom Larsen, Marsha Mary Parmar, Sayedeh Shirin Afyouni Akbari

In this paper ultra clean monolayer and bilayer Chemical Vapor Deposited (CVD) graphene membranes with diameters up to 500 mu m and 750 mu m, respectively have been fabricated using Inverted Floating Method (IFM) followed by thermal annealing in vacuum. Th ...

NATURE PUBLISHING GROUP2020

Micro- and nano-electromechanical systems (M/NEMS) have demonstrated outstanding sensing capabilities down to the yoctogram (10(-24) g) scale in vacuum environment and cryogenic temperatures. In order to bring such extraordinary resolution levels into the ...

IOP PUBLISHING LTD2020

Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices

Luis Guillermo Villanueva Torrijo

Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that has attracted high interest in recent years due to its inherent simplicity, high throughput, low cost and potential for sub-10 nm resolution. In this paper, we revie ...

MDPI2020

On the effect of linear feedback and parametric pumping on a resonator's frequency stability

Luis Guillermo Villanueva Torrijo

Resonant sensors based on micro- and nano-electro mechanical systems (M/NEMS) are ubiquitous in many sensing applications due to their outstanding performance capabilities, which are directly proportional to the quality factor (Q) of the devices. We addres ...

2020