Luis Guillermo Villanueva Torrijo

Publications associées (232)

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Publications associées (232)

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Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Luis Guillermo Villanueva Torrijo, Muhammad Faizan

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 n ...

IOP PUBLISHING LTD2020

Frequency fluctuations in nanomechanical silicon nitride string resonators

Luis Guillermo Villanueva Torrijo, Alper Demir

High quality factor (Q) nanomechanical resonators have received a lot of attention for sensor applications with unprecedented sensitivity. Despite the large interest, few investigations into the frequency stability of high-Q resonators have been reported. ...

AMER PHYSICAL SOC2020

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In this paper, cavitating flows are characterized in 29 microfluidic devices in order to achieve a comprehensive perspective regarding flow patterns in microscale, which is crucial in the applications, such as energy harvesting and biomedical treatment. Wh ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2019

Engineered Lateral Roughness Element Implementation and Working Fluid Alteration to Intensify Hydrodynamic Cavitating Flows on a Chip for Energy Harvesting

Luis Guillermo Villanueva Torrijo, Morteza Ghorbani

Hydrodynamic cavitation is considered an effective tool to be used in different applications, such as surface cleaning, ones in the food industry, energy harvesting, water treatment, biomedical applications, and heat transfer enhancement. Thus, both charac ...

2019

Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators

Luis Guillermo Villanueva Torrijo, Marco Liffredo, Andrea Lozzi

This paper presents the first phase noise (PN) measurements of oscillators based on aluminum scandium nitride (AlScN) resonators. 2-port AlScN contour mode resonators (CMR) operating at 195 MHz arc fabricated. A large pool of Q values (ranging from 150 to ...

IEEE2019

Acoustic Actuation Of Suspended Graphene For Linear Excitation Of 2D Nems

Luis Guillermo Villanueva Torrijo, Muhammad Faizan, Marsha Mary Parmar

In this paper, we present the fabrication of on-chip piezoelectric acoustic actuation for 2D materials. Acoustic actuation is achieved at device level through patterning of aluminum nitride (AlN) thin film at wafer scale. Two piezoelectric stacks consistin ...

IEEE2019

Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

Paul Muralt, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Ramin Matloub Aghdam, Kaitlin Marie Howell, Waqas Bashir

Ultrathin aluminum nitride (AlN) films are of great interest for integration into nanoelectromechanical systems for actuation and sensing. Given the direct relationship between crystallographic texture and piezoelectric (PZE) response, x-ray diffraction ha ...

2019

Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

Paul Muralt, Luis Guillermo Villanueva Torrijo, Andrea Lozzi

In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al0.83Sc0.17N as a piezoelectric layer. Moreover, we assess the electromechanical coupling and the maximum achieved quality factor from 150 to 500 MHz. In comparison to pu ...

2019

Engineered acoustic mismatch for anchor loss control in contour mode resonators

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi

Improving the quality factor (Q) of electromechanical resonators is of paramount importance for different applications, ranging from RF filtering to sensing. In this paper, we present a modified fabrication process flow for contour mode resonators to simul ...

2019

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We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brin ...

AMER INST PHYSICS2019