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A fully functional arrangement of a 2×1 array of active and self-detecting cantilevers, stress sensing metal-oxide-semiconductor transistors and thermal bimorph actuators was introduced. One of the two cantilevers was used as a reference while the other on ...
Nanoscale dispensing is a novel technique to deposit material and create structures at dimensions of 100 nm and below. It has great flexibility in feature shape and choice of deposited material. Due to its potential low cost and lack of time consuming step ...
The dynamic mode atomic force microscopy based on a microfabricated cantilever and a commercial quartz tuning fork was probed. The probe was self-sensing and self-actuating. The tuning fork performed the function of a force sensor. The amplitude and freque ...
Within the last 2 years our consortium has developed, built and tested an atomic force microscope for planetary science applications, in particular for the study of Martian dust and soil. An array of eight cantilevers and tips provides redundancy in case o ...
In this article an integrated force sensor based on a stress-sensing MOS transistor is introduced for applications in scanning force microscopy (SFM) . The sensor configuration will be described, and theoretical and experimental investigations of the sensi ...
