Publications de Stefan Mertin | EPFL Graph Search

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Paul Muralt, Stefan Mertin, Clemens Benedict Nyffeler, Andrea Mazzalai

Scandium doped aluminium nitride (ScAlN) gained much attention during last years, since its piezoelectric response is much enlarged as compared to pure AlN films. Above 30% Sc the films are of high interest for piezoMEMS sensing and actuation, ultrasound g ...

IEEE2019

Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces

Paul Muralt, Ramin Matloub Aghdam, Thomas La Grange, Silviu Cosmin Sandu, Stefan Mertin, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

Sputter deposited Al(1-x)ScxN thin films with a Sc content from x = 0 to 43 at% are investigated by electron microscopy in order to study and explain the formation and growth of abnormally oriented grains (AOG). It is found that the latter did not nucleate ...

Wiley-VCH Verlag2019

Growth, Properties, and Applications of Al1-xScxN Thin Films

Paul Muralt, Stefan Mertin, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

The discovery of enhanced piezoelectricity in solid solutions of AlN and ScN is certainly one of the most important events in piezoelectric MEMS. As compared to pure AlN, it brought a crucial factor 2 to 3 improvement in a number of figures of merit govern ...

IEEE2019

Combinatorial study of low-refractive Mg-F-Si-O nano-composites deposited by magnetron co-sputtering from compound targets

Jean-Louis Scartezzini, Paul Muralt, Silviu Cosmin Sandu, Stefan Mertin

2018

Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

Paul Muralt, Gabriel Christmann, Sylvain Nicolay, Stefan Mertin

2018

Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters

Paul Muralt, Gabriel Christmann, Stefan Mertin, Silviu Cosmin Sandu, Vladimir Pashchenko, Clemens Benedict Nyffeler, Mohammad Fazel Parsapour Kolour

Aluminium scandium nitride (ASN) exhibits a largely enhanced piezoelectric response as compared to aluminium nitride (AlN), which makes it an upcoming piezoelectric material for use in next generation RF filters, sensors, actuators and energy harvesting de ...

Ieee2017

Sputter Deposition Technology For Al((1-X))Sc(X)N Films With High Sc Concentration

Paul Muralt, Gabriel Christmann, Stefan Mertin, Sylvain Nicolay

Aluminium scandium nitride (Al1-xScxN) with its strongly enhanced piezoelectric response is the upcoming piezoelectric material of choice in next generation RF filters, sensors, actuators and energy harvesting devices. This paper will concentrate on the de ...

IEEE2017

Ex-situ AlN seed layer for (0001)-textured Al0.84Sc0.16N thin films grown on SiO2 substrates

Paul Muralt, Silviu Cosmin Sandu, Stefan Mertin, Vladimir Pashchenko, Mohammad Fazel Parsapour Kolour

It is more difficult to nucleate AlN-ScN alloy thin films (AlScN) in pure (0001)-texture than it is with pure AlN thin films. AlN thus can serve as seed layer for AlScN. Equipment limitations may lead to the problem of a vacuum break between AlN and AlScN ...

Ieee2017

Nanocrystalline Low-Refractive Magnesium Fluoride Films Deposited by Reactive Magnetron Sputtering: Optical and Structural Properties

Jean-Louis Scartezzini, Paul Muralt, Silviu Cosmin Sandu, Stefan Mertin

In this work, we study MgF2 thin-film synthesis by reactive pulsed DC magnetron sputtering from a metallic magnesium target in a gas mixture of argon, oxygen, and carbon tetrafluoride (CF4). Nanocrystalline films on silicon and glass substrates with excell ...

Wiley-Blackwell2015

Reactively Sputtered Nano-Structured Multilayer Coatings on Architectural Glazing for Active Solar Energy Façades

Stefan Mertin

Improving the aesthetic of solar thermal collectors would grant architects a huge potential for a perfect integration of solar panels into building façades: this can be achieved by coloured interference coatings on the cover glass. These coatings also open ...

EPFL2015