Surface microfabricated SU-8 devices with integrated electrodes for scanning probe microscopy

We report here on a new method to release functional SU-8 micro-components with embedded and integrated metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducible fabrication of SU-8 structures with integrated metal devices without risk of damage or altering their performance.