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Combined Al-protection and HF-vapour release process for ultrathin cantilevers

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Combined Al-protection and HF-vapour release process for ultrathin cantilevers

Graph Chatbot

Chattez avec Graph Search

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Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

Low-power hermetically sealed on-chip plasma light source micromachined in glass

Low-power hermetically sealed on-chip plasma light source micromachined in glass

High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers

Fabrication of MEMS Resonators in Thin SOI

Single-chip detector for electron spin resonance spectroscopy

Process for the fabrication of hollow core solenoidal microcoils in borosilicate glass

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