Publication

Nanostenciling for fabrication and interconnection of nanopatterns and microelectrodes

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Thermal scanning probe lithography-a review

Jürgen Brugger, Samuel Tobias Howell

Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-SPL) are reviewed here. t-SPL is an emerging direct-write nanolithography method with many unique properties which enable original or improved nano-patterning in appl ...

2020

An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

Georg Fantner, Santiago Harald Andany, Charlène Cécile Geneviève Brillard

In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a ...

BEILSTEIN-INSTITUT2020

Scanning Probe-Directed Assembly and Rapid Chemical Writing Using Nanoscopic Flow of Phospholipids

Vytautas Navikas

Nanofluidic systems offer a huge potential for discovery of new molecular transport and chemical phenomena that can be employed for future technologies. Herein, we report on the transport behavior of surface-reactive compounds in a nanometer-scale flow of ...

AMER CHEMICAL SOC2019

Fast turnaround fabrication of silicon point-contact quantum-dot transistors using combined thermal scanning probe lithography and laser writing

Matthieu Jean Michel Rüegg, Cheng Wang, Nolan Lassaline

The fabrication of high-performance solid-state silicon quantum-devices requires high resolution patterning with minimal substrate damage. We have fabricated room temperature (RT) single-electron transistors (SETs) based on point-contact tunnel junctions u ...

2018

Thermal scanning probe lithography (t-SPL) is an advanced lithography technique in which a heated atomic force microscope tip locally modifies a sample material. Due to the nanometer-sized tip apex diameter, t-SPL enables patterning of sub-10 nm structures ...

EPFL2018

Nanoparticle Manipulation with an AFM Probe

Scanning probe lithography (SPL) includes a variety of techniques which produce nanopatterns based on the interaction between an AFM probe and a substrate, Figure 1 shows an overview of possible techniques of scanning probe lithography. Here we focus on th ...

2017

Silk Fibroin as a Resist for Thermal Scanning Probe Lithography

Jürgen Brugger, Xiao Sheng Zhang, Ya Wang, Samuel Zimmermann

We present for the first time nano-scale patterning of silk fibroin with a thermal scanning probe to locally convert water-insoluble crystalline silk into the water-soluble phase. Our first experiments demonstrate silk as a fully water-based resist for the ...

2017

Direct-write nanoscale printing of nanogranular tunnelling strain sensors for sub-micrometre cantilevers

Georg Fantner, Jonathan David Adams, Maja Dukic Pjanic

The sensitivity and detection speed of cantilever-based mechanical sensors increases drastically through size reduction. The need for such increased performance for high-speed nanocharacterization and bio-sensing, drives their sub-micrometre miniaturizatio ...

2016

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Measuring and understanding the complexity that arises when nanostructures interact with their environment are one of the major current challenges of nanoscale science and technology. High-resolution microscopy methods such as scanning probe microscopy hav ...

Annual Reviews2016

Thermal scanning probe lithography is a novel lithographic method that allows to create three dimension pattern with high precision at the micro and nano scale. In this project, the impact of two important parameters (the distance be- tween the tip and the ...

2016