Evaluation of thermal scanning probe lithography patterns

Thermal scanning probe lithography is a novel lithographic method that allows to create three dimension pattern with high precision at the micro and nano scale. In this project, the impact of two important parameters (the distance be- tween the tip and the substrate before patterning and the electrostatic force) on the depth and the roughness of the pattern were tested. An experiment about a pulsed mode was done to observe the impact on the depth and the roughness. In the end, a small experiment was done to test the repeatability between experiments with identical parameters. This project allowed to show the important impact of the tested parameters on the patterning quality. Moreover, it showed that the use of a new tip changes highly the characteristics of the pattern.

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Pau Mato Sabat, Vincent Philippe Paratte
2016
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https://infoscience.epfl.ch/record/255895?ln=fr

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Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

Jürgen Brugger, Yuliya Lisunova

Applications for high resolution 3D profiles, so-called grayscale lithography, exist in diverse fields such as optics, nanofluidics and tribology. All of them require the fabrication of patterns with reliable absolute patterning depth independent of the substrate location and target materials. Here we present a complete patterning and pattern-transfer solution based on thermal scanning probe lithography (t-SPL) and dry etching. We demonstrate the fabrication of 3D profiles in silicon and silicon oxide with nanometer scale accuracy of absolute depth levels. An accuracy of less than 1nm standard deviation in t-SPL is achieved by providing an accurate physical model of the writing process to a model-based implementation of a closed-loop lithography process. For transfering the pattern to a target substrate we optimized the etch process and demonstrate linear amplification of grayscale patterns into silicon and silicon oxide with amplification ratios of ∼6 and ∼1, respectively. The performance of the entire process is demonstrated by manufacturing photonic molecules of desired interaction strength. Excellent agreement of fabricated and simulated structures has been achieved.

Nature Publishing Group2017

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Parameter

A parameter (), generally, is any characteristic that can help in defining or classifying a particular system (meaning an event, project, object, situation, etc.). That is, a parameter is an element

Méthode expérimentale

Les méthodes expérimentales scientifiques consistent à tester la validité d'une hypothèse, en reproduisant un phénomène (souvent en laboratoire) et en faisant varier un paramètre. Le paramètre que l

Scanning probe lithography

Scanning probe lithography (SPL) describes a set of nanolithographic methods to pattern material on the nanoscale using scanning probes. It is a direct-write, mask-less approach which bypasses the dif