PZT thin film growth and chemical composition control on flat and novel three-dimensional micromachined structures for MEMS devices
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In the present study, piezoelectric, conductivity and dielectric measurements have been performed on virgin and fatigued ferroelectric PZT thin films prepared by spin-on sol-gel deposition process on Si/SiO2/Ti/Pt substrates. By fatiguing, the polarisation ...
For micromechanical applications, piezoelectric PbZrTO3 (PZT) thin films have been deposited on metallised Si3N4/SiO2 layers on Si wafers. Films with compositions near the morphotropic phase boundary (x=0.53) were prepared at 600°C using a multitarget, in- ...
A micromotor for low power applications is being developed using silicon micromachining technologies and organometallic PZT films sol-gel deposition. The construction of a hybrid ultrasonic motor suitable for batch fabrication is proposed. A fabrication pr ...
The piezoelectric properties of lead zirconate titanate (PZT) thin films deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the p ...
The microstructure and preferred orientations of rapid thermally annealed Pb(Zr0.53, Ti0.47)O3 films, deposited on Pt/Ti/SiO2/Si electrode/substrates by solution-gel spinning, have been investigated using analytical and high-resolution electron microscopy ...
PbZrxT1-x O3 (PZT) films on silicon substrates can be used for various micro mechanical devices. An insitu reactive sputter deposition process at 600°C has been developed for this application. Three magnetron sources with metal targets have been applied si ...
A dual element, point, infra-red detector is being developed from a sol-gel deposited PbTiO3 thin-film on a micro-machined silicon substrate. Patterning of the ferroelectric film and the electrodes is accomplished by photolithographic techniques. Membranes ...