Copper / low-k technological platform for the fabrication of high quality factor above-IC passive devices
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Information technology is now an indispensable pillar of a modern-day society, thanks to the proliferation of digital platforms in the past several decades. The demand on robust and economical data processing and storage, however, is growing faster than te ...
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A new kind of high contrast, MEMS-based reflective display system is being developed. The system consists of light reflective flaps on an optically absorptive surface. The novelty is that the flaps are in vertical position at their rest state. They can be ...
Dynamic stencil lithography uses a moving shadow-mask to draw patterns by having directionally evaporated material deposited through the stencil apertures onto the substrate. Sub-micrometre, two- dimensional patterning is demonstrated at full 100 mm wafer ...
In the last forty years the semiconductor industry focused on the downscaling process of the CMOS (Complementary Metal-Oxide-Semiconductor) technology, trying to follow as much as possible the empirical Moore's Law. In the last five years this trend has be ...
The potentials of subthreshold metal-oxide-semiconductor (MOS) solid-state devices for implementing widely adjustable performance integrated circuits with very low power consumption have been investigated. The main concentration of this work is developing ...
The progress in the technology of microelectronic devices has led to a strong miniaturization and high performance for circuits and systems, enabling modern applications such as mobile computing and communications. Today, remaining "off-chip" components th ...
In wireless communications, radio frequency micro-electro-mechanical systems (RF MEMS) technology is attracting tremendous interest across the world as the needs of frequencies gets higher, data bandwidth gets larger and multiple broadband signals have to ...
The development of wireless and mobile communication in the last decade led to the elaboration of new components based on thin films with continually increasing performance and reduced fabrication cost. A fundamental element for mobile communication is the ...
This paper reports on the microfabrication and characterization of piezoelectric MEMS structures based on epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin films grown on silicon wafers. Membranes and cantilevers are realized using a sequence of microfabrication proc ...
Carbon nanotubes (CNT) have been investigated extensively in the recent years for application in nano-electromechanical systems (NEMS). CNTs have extraordinary electrical and mechanical properties. They are stiff, with low density, high electrical conducti ...
