Publication

Oxygen assisted focused electron beam induced deposition of silicon dioxide

Publications associées (157)

Selective Growth of Titanium Dioxide by Low-Temperature Chemical Vapor Deposition

Patrik Willi Hoffmann, Yury Kuzminykh, Michael Oliver Reinke

A key factor in engineering integrated optical devices such as electro-optic switches or waveguides is the patterning of thin films into specific geometries. In particular for functional oxides, etching processes are usually developed to a much lower exten ...

Amer Chemical Soc2015

Combinatorial Characterization of TiO2 Chemical Vapor Deposition Utilizing Titanium Isopropoxide

Patrik Willi Hoffmann, Yury Kuzminykh, Michael Oliver Reinke, Evgeniy Ponomarev

The combinatorial characterization of the growth kinetics in chemical vapor deposition processes is challenging because precise information about the local precursor flow is usually difficult to access. In consequence, combinatorial chemical vapor depositi ...

ACS Publications2015

Surface Kinetics of Titanium Isopropoxide in High Vacuum Chemical Vapor Deposition

Patrik Willi Hoffmann, Yury Kuzminykh, Michael Oliver Reinke

Understanding the surface kinetics of precursor decomposition during thin film formation represents a key aspect in the understanding and engineering of chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. The determination of activ ...

American Chemical Society2015

Femtosecond laser-based production of 3D micro- and nano-devices in transparent substrate: a step toward system-materials

Yves Bellouard

Femtosecond laser irradiation applied to Fused Silica (the amorphous form of SiO2) defines a novel technology platform for highly integrated all-optical microsystems and beyond. In contrast with common approaches that rely on combining materials to achieve ...

Spie-Int Soc Optical Engineering2015

Low Temperature Chemical Vapor Deposition Using Atomic Layer Deposition Chemistry

Patrik Willi Hoffmann, Yury Kuzminykh, Michael Oliver Reinke

Chemical vapor deposition (CVD) techniques rely on high temperatures to activate the chemical decomposition of precursors on the substrate surface. Lower temperatures are applied in atomic layer deposition (ALD), where deliberate pyrolysis of the precursor ...

American Chemical Society2015

Combinatorial HV-CVD survey of barium triisopropyl cyclopentadienyl and titanium tetraisopropoxide for the deposition of BaTiO3

Patrik Willi Hoffmann, Yury Kuzminykh, Michael Oliver Reinke

Barium titanate is a very promising material for the integration of optical communication into electronic integrated circuits. For a successful integration into CMOS compatible technology, a growth process has to be found which allows forming crystalline B ...

Wiley-VCH Verlag Berlin2015

Nanocrystalline Low-Refractive Magnesium Fluoride Films Deposited by Reactive Magnetron Sputtering: Optical and Structural Properties

Jean-Louis Scartezzini, Paul Muralt, Silviu Cosmin Sandu, Stefan Mertin

In this work, we study MgF2 thin-film synthesis by reactive pulsed DC magnetron sputtering from a metallic magnesium target in a gas mixture of argon, oxygen, and carbon tetrafluoride (CF4). Nanocrystalline films on silicon and glass substrates with excell ...

Wiley-Blackwell2015

Fabrication of CMOS-compatible abrupt electronic switches based on vanadium dioxide

Mihai Adrian Ionescu, Clara-Fausta Moldovan, Josef Andreas Schuler, Wolfgang Amadeus Vitale, Antonio Paone

Vanadium dioxide thin films were deposited on amorphous SiO2-coated Si substrates, by reactive magnetron sputtering at 490 °C of a pure vanadium target. The deposition parameters were optimized in order to maximize the resistivity modulation due to the met ...

Elsevier2015

Thermal energy in dry snow avalanches

Michael Lehning, Walter Steinkogler

Avalanches can exhibit many different flow regimes from powder clouds to slush flows. Flow regimes are largely controlled by the properties of the snow released and entrained along the path. Recent investigations showed the temperature of the moving snow t ...

Copernicus Gesellschaft Mbh2015

The Biocompatibility and Anti-Biofouling Properties of Magnetic Core-Shell Fe@C NWs/AAO Nanocomposites

Mahmut Selman Sakar

Soft-magnetic core–multishell Fe@C NWs–AAO nanocomposites were synthesized using anodization, electrodeposition and low-pressure chemical vapour deposition (CVD) at 900 °C. High chemical and mechanical stability is achieved by the conversion from amorphous ...

Royal Society of Chemistry2015

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