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Helicon sources are known to produce high-density plasmas and have found many applications. Different types of antenna have been used for helicon excitation but none of them generate a radio-frequency (rf) field that matches the helicon wave field determined by the dispersion equation. We show that this match can be obtained to a very good approximation by using a birdcage type antenna. Our plasma experiments show that a helicon regime with electron densities up to 5x10(12) cm(-3) is obtained for very low rf power injection (typically 200 W), and at an unusual operating pressure up to 25 Pa.
Anja Skrivervik, Zvonimir Sipus, Mingxiang Gao
Stefano Alberti, Ivo Furno, Alessandro Geraldini