Study of the beam path distortion profiles generated by a two-axis tilt single-mirror laser scanner

Beam distortion profiles are studied for scanning devices that have a single mirror with two rotational degrees of freedom (DOF), also named tip/tilt scanners. The case of a fast steering scanner used for high power material processing applications is studied. The scanner has a bandwidth of 700 Hz, a range of motion of ±52 mrad (±3 deg), and a resolution