Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation
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This research has been sponsored by the Centre Suisse d'Electronique et de Microtechnique (CSEM) in Neuchâtel, Switzerland. It introduces a system and the algorithms for Pedestrian Navigation using a combination of sensors. The main objective is to localis ...
Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10̂nm deep, 200̂nm wide and up to 8̂cm long. We demonstrated that different materials, such as silicon nitride, polysilicon and silicon dioxide, combined with ...
Modern communication devices demand challenging specifications in terms of miniaturization, performance, power consumption and cost. Every new generation of radio frequency integrated circuits (RF-ICs) offer better functionality at reduced size, power cons ...
We aim at developing ultralight autonomous microflyers capable of navigating within houses or small built environments. Our latest prototype is a fixed-wing aircraft weighing a mere 10 g, flying around 1.5 m/s and carrying the necessary electronics for air ...
Rayleigh backscattering measurements on a fiber ring resonator enables to monitor loss and gyroscopic motion experienced by the ring. This easy-to-use technique yields to very sensitive fiber loss sensors and polarization-insensitive and low-cost gyroscope ...
Society of Photo-Optical Instrumentation Engineers1999
A novel kind of fiber-optic gyroscope based on Rayleigh backscattering in a fiber-ring resonator is presented in this letter. Information on the rotation rate is obtained from the composed response of the fiber ring to an optical time-domain reflectometry ...
We present powder blasting as a new technology for the realization of Micro Electro-Mechanical Systems (MEMS). The technique is base don the erosion of a masked substrate by a high velocity powder beam. We study the erosion rate of the process using glass ...
In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O-3 thin film ...
In this paper a new method for gyroscopic sensitivity evaluation of a vibrating angular rate sensor is presented. This method is used to evaluate the angular rate sensitivity of a four-beam-bridge gyroscope realized at IMT Neuchatel [ii. The frequency spli ...
In this paper, we present the design aspects of a compact tip/tilt, fast steering laser scanner. The scanner is composed of one single mirror with a large active area, driven by linear electromagnetic actuators. The suspension of the mirror is based on a c ...