Apparatus for producing gas mixture from hexamethyldisiloxane and carrier gas, e.g. oxygen, as process gas comprises filling packing arranged in a vertical column which can be cooled
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Dielectric Barrier Discharges (DBD) have been used for more than a century, especially for ozone production. Research conducted within the last twenty years has investigated the discharge mechanisms involved and the different discharge regimes observable ( ...
Regions of positive slope in the pressure-discharge characteristics are one of the major concerns in design and operation of centrifugal pumps, as they are limiting the admissible operating range to values above the critical discharge. The industrial pump ...
In the pursuit of a portable gas detector/analyser we studied the components of an ion mobility spectrometer (IMS), which is a device that lends itself well to miniaturisation. The component we focused on was the ionizer. We fabricated a series of micro io ...
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is compatible with most of MEMS resonators and Resonant Suspended-Gate MOSFET [1] ...
The invention relates to a device for producing a gas mixture consisting of HMDSO and oxygen, whereby process gas is produced. In order to be able to continuously produce a large volume of process gas using such a device and to be able to withdraw the same ...
