High coupling materials for thin film bulk acoustic wave resonators
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The paper discusses different possibilities for controlling piezoelectric properties of ferroelectric materials and devices. The piezoelectric properties engineering can be made on different scales. Tuning of the piezoelectric response by controlling contr ...
The effective piezoelectric transverse coefficient e(31,f) was measured on various lead zirconate-titanate (PZT) and aluminum nitride thin films. The measurement set-up is based on the collection of the electric charges created by the forced deflection of ...
Fatigued state of the Pt-PZT-Pt system is studied by means of low-temperature conduction measurements. It is shown that the conduction in the temperature interval of 100-140 degrees K is determined by the cold field emission of electrons (tunneling conduct ...
The effect of acceptor (Na, Mg, Fe) and donor (Nb,Ta) dopants on the switching properties of Pb(Zr0.53Ti0.47)O-3 (PZT) thin films with Pt electrodes was investigated for broad dopant concentration ranges. The effect of dopants on endurance was found to be ...
The shape of the grains and the granulometry distribution of the PZT powder are the main factor influencing the densification. In addition, we shown that a higher concentration of PZT powder in the ink with a right rheology of the ink improves the density ...
In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O-3 thin film ...
We present a critical view of the analysis of experimental island densities acquired as a function of temperature in terms of barriers and prefactors for tracer diffusion at surfaces. We investigate the achievable precision for methods ranging from simple ...
Effective transverse piezoelectric coefficient e(31,f) has been measured on (100)/(001) sol-gel Pb(ZrXTi1-X) thin films with compositions between 30% and 45% Zr. A maximum value of 8.07 +/- 0.36 C/m(2) at 40% Zr is found. The influence of the poling field ...
The self-polarization effect is investigated in Pb(Zr,Ti)O-3 (PZT) thin films deposited by sol-gel and magnetron sputtering techniques. The effective piezoelectric coefficient of as-grown films, which is proportional to their initial polarization (self-pol ...
The piezoelectric properties of rhombohedral relaxor-ferroelectric compositions close to morphotropic phase boundary have been studied as a function of temperature. As they exhibit, upon heating, a rhombohedral to tetragonal phase transition the piezoelect ...
