Modeling and compensation of cutting-forces generated during the EDM process for ultra high-precision robots

This work deals with the calibration of industrial robots operating at sub-micrometric precision. We demonstrate that the cutting-forces generated by the robot manufacturing process cause a significant deformation of the robot geometry, lo- wering its absolute accuracy. Then, we propose a way of studying and modeling such deformations, in order to compen- sate them during the robot usage. We have taken the micro electro-discharge machining process on the robot Agietron micro-nano as a case study and we have used an ultra high-precision measuring system to evaluate the deformations due to cutting-forces. Finally, we have built a mathematical model of the robot physical behavior and we have implemented it in the robot controller, in order to compensate the deformations in real-time.

Thermal Calibration of a 3 DOF Ultra High-Precision Robot Operating in Industrial Environment

Reymond Clavel, Emanuele Lubrano

While dealing with sub-micrometer precision robots, thermal expansion is the most significant source of inaccuracy. Thermal variations in the environment, in the robot parts and in the frame change the robot geometry, lowering the robot precision. In this article we propose a strategy to model and compensate such effects. The thermal behavior of a 3 DOF (Degree(s)-of-freedom) parallel robot has been studied using a high-precision measuring system. A model of the robot thermal behavior has been built and implemented in the controller. By using it, thermal deformations are compensated in real-time and an absolute accuracy of ±71 nm has been reached.

IEEE2010

Calibration of Ultra-high-precision Robots Operating in an Unsteady Environment

Emanuele Lubrano

In recent years nanotechnology has become an enabling technology for the development and fabrication of new innovative products. The growth of micro- and nano-manufacturing lies in the ability of converting micro- and nano-fabrication techniques into mass-production industrial processes, where small-scale products can be economically manufactured in a short period of time. When dealing with nano-scale objects and industrial processes it is necessary to take into account the physics acting at this level of precision. Phenomena such as friction, heat transfer, and adhesion forces have far more dramatic effects on the deformation of the robot geometry at the nano-scale than at macro- and micro-scales, thus affecting the industrial process that the robot will perform. The development of micro- and nano-fabrication techniques thus requires a thorough understanding of the physics behind nanorobotics. Specifically, to enable sub-micrometer accuracy for ultra-high-precision robots it is necessary to acquire a complete knowledge of how all sources of inaccuracy deform the robots at nano-scale. Furthermore, a way to compensate for such effects to maintain an acceptable level of accuracy has to be found. In this thesis we fulfill these needs by proposing a new calibration procedure specifically designed for industrial nano-systems working in a thermally unstable environment, a method to evaluate and compensate for external forces acting on ultra-high-precision robots and a method to relate the calibration of several robots working together. This is done by measuring how each source of inaccuracy deforms the robot, modeling this effect and compensating it in real-time. To allow this modus operandi, we propose a new calibration procedure summarized in the following six steps: Step 0 A judicious design of the robot that takes into account the calibration problem and the pose measurement, Step 1 Study of the sources of inaccuracy linked to the robot and the industrial process that it will perform, Step 2 Measurement of several end-effector poses, Step 3 Identification of a function that describes the robot geometry and its behavior when subjected to the sources of inaccuracy identified in Step 1, Step 4 Implementation of the model found in Step 3 into the robot controller, Step 5 Validation and potential return to Step 1 or Step 0. The effectiveness of this calibration procedure is proven by testing it on three case studies, examined in order of complexity: A 1 DOF (degree(s)-of-freedom) ultra-high-precision linear axis was calibrated while thermal effects were deforming it. The 3 DOF ultra-high-precision parallel robot Agietron Micro-Nano was calibrated while thermal effects and an external force were acting on it. An ultra-high-precision 2-robot system was calibrated while thermal effects were acting on it. Thus, an exhaustive study on relating the references of the two robots was carried out. For each case we developed an appropriate ultra-high-precision measuring system used to acquire the pose of the robot end-effector. We measured the end-effector position throughout the workspace while the sources of inaccuracy were acting on the robot to map how they affect the robot geometry. We used the Stepwise Regression algorithm to identify a mathematical model able to describe the geometric features of the robot while all the sources of inaccuracy are acting on it. The model is then implemented in the robot controller and a validation of the calibration accuracy is performed. For every ultra-high-precision robot considered in this work we reached an absolute accuracy of ±100 nm. We finished the coverage of this thesis by analyzing the nano-indentation process as a calibration confirmation tool and as an industrial process. Furthermore, we describe how to use a multiple ultra-high-precision concurrent system of robots. This work was financed by the FNS (Swiss National Foundation for research).

EPFL2011

Concept of Modular Kinematics to Design Ultra-high Precision Parallel Robots

Murielle Richard

Miniaturisation will be the key challenge for the next decade in numerous industrial fields, such as microelectronics, optics and biomedical engineering. Although most of their products already achieve footprints of some square millimeters, the trend towards the integration of a maximum number of elements in a minimal volume requires even more compact components. This tendency creates a growing need for industrial robots able to perform micromanipulation and microassembly tasks with a submicrometric precision. Nonetheless, the design of such machines is nowadays costly, both in time and money, mostly because of the twofold complexity of their development: first, from a kinematic standpoint, the use of a parallel structure consists in a particularly interesting approach to build ultra-high precision robots. However, the synthesis of such a kinematics proves especially challenging for machines presenting more than 3 degrees of freedom. Moreover, the resulting robots are scarcely flexible: if the industrial specifications are modified, which for example necessitates to add a degree of freedom or to change the position of a rotation centre, the design process has to be restarted, often from the very beginning. The second challenge consists in the mechanical design of flexure-based mechanisms: flexure hinges are joints which are based on the elasticity of the matter. They allow to perform motions which are without friction, backlash and wear; their use is thus mandatory to achieve the aimed submicrometric precision. Albeit the synthesis of planar and low-degree of freedom structures is now widely investigated, the development of a whole tridimensional flexure-based robot is still infrequent, especially in the industrial context. This thesis thus introduces a modular design methodology which significantly reduces the time-to-market of ultra-high precision robots. This procedure can be compared to a robotic Lego, where a finite number of conceptual building bricks allows to easily design and modify parallel robots. Furthermore, this work shows that the machines resulting from this approach present similar or even improved performances compared to robots developed more traditionally. The key aspect of this thesis consists in the concept of modular kinematics, which aims at facilitating the synthesis of parallel kinematics thanks to solution catalogues. At this step of the methodology, the conceptual building bricks and the kinematics are totally independent from any mechanical design: they can thus be used to synthesise a large variety of robots, from machine-tools to microscale robots. An exhaustive conceptual solution catalogue groups all kinematics generated by the combination of the building bricks. Then, a reduced solution catalogue for ultra-high precision is proposed: based on selection criteria linked with the design and machining of flexure-based mechanisms, it allows to reduce the total number of solutions and thus facilitates the practical use of the concept. The second part of this work details the mechanical design of the building bricks, whose main challenge consists in increasing the ratio between the working ranges of the mechanisms and their overall size. One or more flexure-based solutions have been developed for each motorised brick: a special emphasis is given to the original use of a Remote Centre of Motion, which allows to achieve high rotation angles while drastically reducing parasitic translations. The development of a standardised actuation sub-brick, common to all motorised bricks, introduces a new level of modularity, thus increasing even more the flexibility of the methodology. As for non-actuated bricks, original designs and uncommon uses of well-known mechanisms are proposed. A case study on a 5-degree of freedom robot, Legolas 5, finally illustrates the practical use of the methodology: first, the selection in the solution catalogue of a kinematics adapted to the specifications of the robot is detailed. Then, the development of the Legolas 5 prototype highlights the mechanical design of the necessary building bricks, as well as assembly subtleties, such as force alignment and gravity compensation, which allow to shrewdly design a high-performance robot. The measurements of this machine have shown motion resolution and repeatability of 50 nm in translation and 1.9 µrad in rotation (limited by the sensor resolution). This case study has generated the Legolas family, a new family of ultra-high precision parallel robots, which notably includes the orthogonal version of the Delta kinematics: using only 6 of the conceptual building bricks, one solution can be built for each of the 19 possible robot mobilities. The promising characterisation of the Legolas 5 tends to suggest that the robots from this family will be interesting candidates to fulfill the upcoming need for quickly designed and high-performance industrial ultra-high precision machines.