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High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers

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High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers

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Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE

Deep-ultraviolet–microelectromechanical systems stencils for high-throughput resistless patterning of mesoscopic structures

DRIE based novel technique for AFM probes fabrication

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Generic technological platform for microfabricationg silicon nitride micro-and nanopipette arrays

Method for fabricating micromirror for barcode reader, involves forming holes having diameter less than width of arms on both side of micromirror and wafer and on edges of region separating wafer and micromirror by etching arms

Combined Al-protection and HF-vapour release process for ultrathin cantilevers

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