Publication

Reversed processing of dry photoresist: application to the encapsulation of chemical sensors

Publications associées (38)

Microfluidic Scintillation Detectors for High Energy Physics

This thesis deals with the development and study of microfluidic scintillation detectors, a technology of recent introduction for the detection of high energy particles. Most of the interest for such devices comes from the use of a liquid scintillator, whi ...

EPFL2015

Top-Down Fabrication of Silicon Nanowires in Ultra-deep Trenches

Georg Fantner, Davide Sacchetto, Yusuf Leblebici, Oliver Peric, Zuhal Tasdemir

One-Dimensional (1D) nanostructures have gained a considerable attention in the field of semiconductor technology for the past several decades. With the help of rapid development in the process technology, it becomes possible to scale these nanostructures ...

2014

Improved test setup for MEMS mechanical strength investigations and fabrication process qualification

Herbert Shea, Xavier Maeder, Tobias Bandi

ABSTRACT The mechanical stability of silicon MEMS dies is strongly influenced by the microfabrication processes, especially grinding, dicing and etching, which leave characteristic damage (defects, cracks, dislocations...) in the substrate material. Specia ...

2014

Three-dimensional polymeric microtiles for optically-tracked fluidic self-assembly

Jürgen Brugger, Alcherio Martinoli, Massimo Mastrangeli

Self-assembly (SA) is a bio-inspired key coordination mechanism for swarms of intelligent agents as well as a pervasive bottom-up methodology for the fabrication of heterogeneous micro- and nanosystems. Analytical studies of SA at small scales are therefor ...

Elsevier2014

3D-Integration of a Carbon Nanotube based RF-NEMS

Rokhaya Gueye

In the framework of the NanoTera project CabTuRes, a system-in-package for a nano-resonator was proposed, integrating CMOS driving electronics and vacuum encapsulation. This doctoral research aimed to investigate 3D-integration technologies for a Single-Wa ...

EPFL2013

Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation

Nico de Rooij, Danick Briand, Francisco Molina Lopez, Andres Felipe Vasquez Quintero, Giorgio Mattana

This work presents the simultaneous fabrication of ambient relative humidity (RH) and temperature sensors arrays, inkjet-printed on flexible substrates and subsequently encapsulated at foil level. These sensors are based on planar interdigitated capacitors ...

Iop Publishing Ltd2013

3D Integration Technology for Lab-on-a-Chip Applications

Yüksel Temiz

This study adds a new dimension to lab-on-a-chip systems by employing three-dimensional (3D) integration technology for improved performance, higher functionality, and on-chip computational power. Despite the extensive amount of current research on 3D memo ...

EPFL2012

Polymeric foil optical waveguide with inkjet printed gas sensitive film for colorimetric sensing

Nico de Rooij, Danick Briand, Jérôme Courbat

The design of low-cost and low-power optical transducers on plastic foil for colorimetric gas sensors is proposed. The transducer was fabricated from PET or PEN foil on which polymeric micro-mirrors and colorimetric film were patterned using additive techn ...

Elsevier2011

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Jürgen Brugger, Andreea Veronica Savu, Nicolas Blondiaux, Oscar Vazquez Mena, Harry Heinzelmann, Mona Julia Katharina Klein, Raphaël Pugin, Franck Montagne

In this work, nanosphere lithography was integrated with standard microfabrication for the wafer-scale fabrication of silicon nitride (SiN) membranes with arrays of submicrometer holes. A monolayer of polystyrene (PS) beads with a mean diameter of 428 or 5 ...

2011

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Jürgen Brugger, Andreea Veronica Savu, Nicolas Blondiaux, Oscar Vazquez Mena, Harry Heinzelmann, Mona Julia Katharina Klein, Raphaël Pugin, Franck Montagne

2011

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