Scanning probe microscope e.g. atomic force microscope, has two actuators arranged in opposed push-pull configuration, and support constrains motion of one of two actuators in one axis to permit translation along another axis
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NOVELTY - The microscope (11) has a set of four actuators (14, 16, 18, 20) i.e. piezoelectric actuators, and a strain gauge coupled to two opposed actuators (14, 18), arranged in opposed push or push-pull configuration to measure the differential motion of ...
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