Searching for optimum conditions in the laser writing of small ohmic contacts
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Epitaxial Laser Metal Forming (E-LMF) consists in impinging a jet of metallic powder onto a molten pool formed by controlled laser heating and thereby, generating epitaxially a single crystal deposit onto a single crystal substrate. It is a near net-shape ...
Electronic device-quality Cu was deposited on Pt-patterned oxidized Si wafers from hexafluoroacetylacetonate-copper(I)-trimethylvinylsilane by using low-pressure chem. vapor deposition at 150-250 Deg in He carrier gas. Smooth Cu films ?0.8 mm thick have be ...
The present work is part of a feasibility study to investigate the excimer laser photon-assisted thermal decompn. of anthracene at 248 nm. The principle is to combine UV photons of an appropriate light source and heat in an incinerating reactor at modest t ...
Because of the strong electron-phonon coupling of the emitting 3d orbital in transition-metal (TM) ions, 3d systems exhibit luminescence with typically several hundred nm of spectral bandwidth. TM-ion-doped materials are, therefore, of high interest for ap ...
Abstract: Packaging is the last step of the manufacturing process of Microsystems. The LPM is working on the development of a two-part soldered packaging. One part of the package is metallic; the other part is made of glass. The goal of the project is to s ...
A 351-363 nm wavelength argon laser is used to induce pyrolytic laser chem. vapor deposition of platinum, using platinum bishexafluoroacetylacetonate as a precursor. The deposit thicknesses and diams. are presented according to exposure time, precursor pre ...
In this paper we present briefly two possible approaches for modelling the laser cladding process. The first approach is 2D and consists in finding the shape of the molten pool given the fraction of the laser power which is available at the surface of the ...
A model which takes into account the main phenomena occurring during the laser-cladding process is proposed. For a given laser power, beam radius, powder jet geometry, and clad height, this model evaluates two other processing parameters, namely, the laser ...
The low-pressure chem. vapor deposition of copper and platinum was studied on SiO2 substrates which had been locally prenucleated with ultrathin metal layers of Pt, Cu, Pd, Au, and W. These layers were between 0.1 and 30 .ANG. thick and were produced by va ...
Laser-induced CVD has been used to produce Pt lines on pyrex glass substrates by means of platinum bis(hexafluoroacetylacetonate) as precursor. The effect that writing speed has on the line geometry and resistivity was studied, as well as the influence of ...