MEMS Inertial Sensor to Measure the Gravity Gradient Torque in Orbit

Since the dawn of the Space Age, over six thousand satellites have been launched into Earth orbit. The function of determining the orientation of a satellite in orbit, so that it can point its antennas and instruments in the required direction is known as attitude determination. Depending on the nature of the mission, this important function is typically performed by means of optical instruments that determine the orientation of the satellite with respect to known bodies such as the Earth, the sun, and bright stars. Conventional Earth sensors use cameras and telescopes to locate the position of the Earth's horizon and hence to calculate the orientation of the satellite. In the event that a satellite starts to tumble, existing Earth sensors that use optical sensing are severely limited in their ability to reacquire the attitude due to the limited field of view of the instruments. Also, due to this limited field of view, multiple Earth sensor units need to be placed on all faces of the satellite to ensure 4π steradian coverage. Because of the optical sensing principle of existing Earth sensors, constraints are imposed on the positioning of solar panels and antennas so that they do not block the field of view of optical sensors. This thesis describes a novel inertial sensor that uses the Earth's gravity gradient as a reference for attitude determination on-board a satellite in low Earth orbit. Using the gravity gradient for attitude determination makes it possible to realise a single, compact Earth sensor instrument which can be positioned flexibly within the satellite. Due to its 4π steradian field of view, such an instrument can offer added capability as a backup sensor, or act as the main Earth sensor. By using Micro-Electro-Mechanical System (MEMS) technology for the inertial sensor, a target mass of 1 kg and target volume of 1 dm3 can be realised for the entire gravity gradient Earth sensor system. The gravitational force decreases as the square of the distance from the center of the Earth. An elongated object in orbit around the Earth will have slightly different values of gravity acting over the different points in its volume. This gives rise to a small torque, the Gravity Gradient Torque (GGT), on the object. A compact micromachined inertial sensor was designed with an elongated proof mass and compliant spring to measure the GGT, so that the orientation of the proof mass with respect to the normal from the Earth's surface can be determined. Such a sensor on-board a satellite can act as an Earth sensor, and provide information about the satellite attitude with respect to the normal to the Earth's surface. An inertial sensor to measure GGT, which with readout electronics fits within a 1 dm3 volume, has to measure a torque of magnitude 10-15 N.m. Currently, no inertial sensor is capable of such a fine measurement. In addition to the required performance in microgravity, the inertial sensor must be robust enough to be tested on Earth with no special handling, and must survive the vibration and shock of a launch, to be used in space. The readout scheme to measure the displacement due to GGT must also be simple and robust. The designs of two generations of a novel inertial sensor to measure the GGT are presented in the thesis. To be able to measure the GGT with the required accuracy a sensor is designed that has a proof mass 5 cm long, suspended by springs which have widths less than ten microns. The sensor resonant frequency of the inertial sensor is on the order of 1 Hz. A new fabrication process is developed for the sensor, which incorporates hard stops to limit the motion of the proof mass along all the axes, thus making it robust enough for testing without any special precautions. The sensor survives low magnitude vibration tests. A digital electronic readout based on capacitive sensing of the displacement due to GGT, is developed based on commercially available ICs, and allows easy interfacing of the inertial sensor output to a PC or microcontroller. To test the sensor on Earth, a dedicated test setup is developed to replicate the nm-scale motion of the proof mass expected in orbit. The electronic readout is capable of measuring the sub-nm displacements due to GGT. The 2nd generation sensor design with capacitive displacement sensing is the first demonstration of an inertial sensor capable of measuring the GGT in low Earth orbit, and an important step towards realization of a 1 kg, 1 dm3 Earth sensor that uses the gravity gradient of the Earth for attitude determination.

Instrumented shoes for daily activity monitoring in healthy and at risk populations

Christopher Moufawad El Achkar

Daily activity reflects the health status of an individual. Ageing and disease drastically affect all dimensions of mobility, from the number of active bouts to their duration and intensity. Performing less activity leads to muscle deterioration and further weakness that could lead to increased fall risk. Gait performance is also affected by ageing and could be detrimental for daily mobility. Therefore, activity monitoring in older adults and at risk persons is crucial to obtain relevant quantitative information about daily life performance. Activity evaluation has mainly been established through questionnaires or daily logs. These methods are simple but not sufficiently accurate and are prone to errors. With the advent of microelectromechanical systems (MEMS), the availability of wearable sensors has shifted activity analysis towards ambulatory monitoring. In particular, inertial measurement units consisting of accelerometers and gyroscopes have shown to be extremely relevant for characterizing human movement. However, monitoring daily activity requires comfortable and easy to use systems that are strategically placed on the body or integrated in clothing to avoid movement hindrance. Several research based systems have employed multiple sensors placed at different locations, capable of recognizing activity types with high accuracy, but not comfortable for daily use. Single sensor systems have also been used but revealed inaccuracies in activity recognition. To this end, we propose an instrumented shoe system consisting of an inertial measurement unit and a pressure sensing insole with all the sensors placed at the shoe/foot level. By measuring the foot movement and loading, the recognition of locomotion and load bearing activities would be appropriate for activity classification. Furthermore, inertial measurement units placed on the foot can perform detailed gait analysis, providing the possibility of characterizing locomotion. The system and dedicated activity classification algorithms were first designed, tested and validated during the first part of the thesis. Their application to clinical rehabilitation of at risk persons was demonstrated over the second part. In the first part of the thesis, the designed instrumented shoes system was tested in standardized conditions with healthy elderly subjects performing a sequence of structured activities. An algorithm based on movement biomechanics was built to identify each activity, namely sitting, standing, level walking, stairs, ramps, and elevators. The rich array of sensors present in the system included a 3D accelerometer, 3D gyroscope, 8 force sensors, and a barometer allowing the algorithm to reach a high accuracy in classifying different activity types. The tuning parameters of the algorithm were shown to be robust to small changes, demonstrating the suitability of the algorithm to activity classification in older adults. Next, the system was tested in daily life conditions on the same elderly participants. Using a wearable reference system, the concurrent validity of the instrumented shoes in classifying daily activity was shown. Additionally, daily gait metrics were obtained and compared to the literature. Further insight into the relationship between some gait parameters as well as a global activity metric, the activity âcomplexityâ, was discussed. Participants positively rated their comfort while using the system... (Please refer to thesis for full abstract)

EPFL2016

Sensor and the Beast: Generalised Methods to Recognise Animal Behaviour and Quantify Energy Expenditure Using Inertial Sensors, and Applications

Pritish Chakravarty

How an animal allocates time and energy to different activities has repercussions for its survival, fitness, and response to changing environmental conditions. Fine-scale information on animal behaviour and energy expenditure can help develop better informed, targeted strategies to conserve and manage wild animal populations in the face of increasing anthropogenic impact, and climate change. However, wild animals are notoriously difficult to observe. Miniature data-logging devices attached to animals can address these difficulties by making it possible to remotely observe animals through the eyes of recorded data. Inertial sensors such as accelerometers that are sensitive to movement and the lack of it have offered a powerful tool to remotely quantify both animal behaviour and energetics over the last two decades. However, even though many studies have been able to infer common, coarse-scale animal behaviours such as resting, locomotion, and feeding/foraging from accelerometer data, there is a lack of general methods that can be applied across species and further the uptake of this technology. Further, few studies have been able to resolve fine-scale behaviours, possibly because of the nonstationary signals recorded during complex behaviour. Finally, techniques used to quantify energy expenditure from accelerometer data rely on assumptions that may not always be valid. Magnetometers, another kind of inertial sensor often included in animal tags, have shown the potential to capture both static and dynamic components of movement, as well as the ability to detect some behaviours that accelerometers miss. Yet, no study has explored the potential of magnetometers to recognise common animal behaviours, and perform a one-to-one comparison between accelerometers and magnetometers to assess the relative strengths and weaknesses of these two sensors. The main objectives of this thesis were to address these issues by developing general, robust methods to quantify behaviour and energy expenditure (EE) from inertial sensor data. The thesis first presents a biomechanically driven learning approach for the recognition of common animal behaviours. Using data collected on 10 wild meerkats (Suricata suricatta), I show the high accuracy and robustness of this model to recognise common meerkat behaviours (resting, vigilance, foraging, and running) not only with accelerometers, but also, in a separate study, with magnetometers. Next, the thesis presents a new approach to resolve fine-scale behaviours. Here, complex behaviour is conceptualised as being composed of characteristic impulsive movements (microevents) producing brief shock signals in accelerometer data. Microevents are first detected using appropriate signal processing, and then recognised using robust machine learning. Finally, inspired from approaches adopted in human studies to estimate EE, this thesis proposes a new method for estimating EE based on metabolic equivalent of task (MET), which depends on only behaviour duration, and so avoids problematic assumptions about accelerometer data. Finally, I come full circle by applying these "engineering" developments to the "ecological" question of how differences in individual traits, such as body mass, affect foraging strategy in free-ranging, wild, group-living meerkats, and find that lighter females adapt their foraging strategy to avoid conflict and loss of food to heavier females.

EPFL2020

Highly sensitive vertical hall sensors in CMOS technology

Enrico Schurig

Vertical Hall sensors are capable of measuring surface-parallel components of the magnetic field. They allow therefore relatively easy conception of single-chip multi-axial magnetic sensors compared to solutions using horizontal Hall plates. The modern trend in the field of Hall sensors is to integrate them into electronic circuitry for signal processing. Before this thesis, highly sensitive vertical Hall sensors completely compatible to a technology adequate for co-integration of electronic circuitry were not available. This is the reason why we present in this thesis the developed knowledge that is necessary for the design and manufacture of highly sensitive vertical Hall sensors in CMOS technology. We first present the principles of the technology choice. A wide selection of CMOS processes is presently available, but in order to obtain optimal sensitivity we have to choose "the right" one. The performances can vary easily by 50% from one technology to another. The best choice are CMOS high-voltage technologies since they deliver n-diffusion layers with relatively low doping level and deep junction depth. We present a novel layout of vertical Hall sensors that has six contacts in the active sensor zone and is a development of the known layout that uses only four contacts. The additional contacts improve the sensitivity and reduce the systematic offset considerably. If we re-use layouts that were optimal for not-CMOS compatible technologies, we will see that the results are not satisfying. We have to develop our specific design parameters that are optimal for the chosen technology. The key for high sensitivities is the strong miniaturization of the devices down to technological limits given by the design rules, but sometimes even beyond that. Some of the design rules can be broken with benefit for the obtained sensor devices. In general, minimum contact sizes and contact distances are preferable as well as a minimum sensor thickness. The difficulty is however to find the absolute minimum before device degradation or even failure will occur. Our optimized sensors achieved voltage related sensitivities of about 0.04 V/(VT) and current related-sensitivities up to 400 V/(AT) that are comparable to existing CMOS compatible horizontal Hall plates. Such sensitivities were never reported for a standard CMOS process, without any additional pre- or post-processing steps. The miniaturization of the Hall devices has however also negative aspects e.g. an increase in sensor offset, noise and output non-linearity. Although Hall sensors have many advantages in comparison to other magnetic sensors (simple structure, low fabrication costs, very good linearity, robustness) they have the drawback of a big Abstract offset voltage that is often too big for many applications. This is why an enormous effort was made by researchers in the past to develop offset reduction methods for horizontal Hall plates. We state in this thesis that, in principle, the same techniques are applicable on vertical Hall sensors but for an optimal efficiency certain principles/parameters have to be respected. We reveal the relations of important parameters as the type of layout (number of sensor contacts), the use of single or coupled sensors, the type of spinning-current, bias level etc. In the optimal case we can obtain residual offset values lower than 200 μT for bias voltages up to 2 V. The spinning current method was originally developed for offset compensation, but it has other beneficial influences on the sensor output signal as well. It is capable to remove a large amount of flicker noise if the spinning is executes at adequately high clock frequencies. We show that the efficiency of flicker noise removal is dependent on the bias current through the sensor. We discovered another positive side effect of the spinning-current method: the elimination of the planar Hall effect. While the planar Hall sensitivity for our sensors is initially about 1% of the normal one at B = 2 T, we obtain with the compensation technique values of only 0.02%. After the presentation of general characteristics of the separate sensors, we present two microsystems based on the developed vertical Hall sensors. At first, we present a 2D magnetic microsystem which is well adapted for the construction of contactless angular encoders with a measurement range of 360°. We profit here especially from the very low offset (< 400 μT) obtained with the spinning current method, since offset is in general the main source of angular errors in such systems. Existing angular measurement systems need in general a special (offset) calibration of the sensor unit in order to achieve an accuracy of 2.5‰ full scale. We obtain such a precision directly with our system for a wide temperature range from -30 to 100 °C. With one specific sensor calibration for the compensation of residual offset, sensitivity mismatch and phase mismatch of the two axes, we attain a precision of about 0.5‰ FS over the same temperature range, a performance never before reported with a magnetic sensor system. The microsystem is therefore an excellent candidate for the majority of low-cost angular measurement applications. As a second example we presented the first fully CMOS integrated three-dimensional Hall probe, consisting of a combination of one Hall plate and four vertical Hall devices. The microsystem allows an application as a universal magnetic field probe in the wide field range from 0.1 mT to 20 T. The probe can be easily used for small volumes because of its small size and the fact that the signal processing circuitry already is directly integrated onto the chip. The precision as a 3D magnetometer is limited by the sensitivity mismatch of about 5% FS. The probe is an ideal candidate for low-cost teslameter applications with limited precision.

EPFL2005